Dennis, J. (2016). Post micromachining of MPW based CMOS�MEMS comb resonator and its mechanical and thermal characterization. Springer Verlag.
Chicago Style CitationDennis, J.O. Post Micromachining of MPW Based CMOS�MEMS Comb Resonator and Its Mechanical and Thermal Characterization. Springer Verlag, 2016.
MLA CitationDennis, J.O. Post Micromachining of MPW Based CMOS�MEMS Comb Resonator and Its Mechanical and Thermal Characterization. Springer Verlag, 2016.
Warning: These citations may not always be 100% accurate.