Influence of crack growths on the performances of cantilever based MEMS devices: Design and simulations

by Jan, M.T., Hamid, N.H.B., Md Khir, M.H.B., Shoaib, M., Mirza, A.
Published 2014
Institution: Universiti Teknologi Petronas

Characterization of MEMS comb capacitor

by Ahmad, F., Baig, A., Dennis, J.O., Hamid, N.H.B., Md Khir, M.H.B.
Published 2020
Institution: Universiti Teknologi Petronas

Temperature dependent Young's modulus and quality factor of CMOS-MEMS resonator: Modelling and experimental approach

by Jan, M.T., Ahmad, F., Hamid, N.H.B., Md Khir, M.H.B., Ashraf, K., Shoaib, M.
Published 2016
Institution: Universiti Teknologi Petronas