Effects of edge cracks on the dynamics of piezoelectric cantilever based MEMS sensor

This paper presents edge crack fault modeling for piezoelectric cantilever based MEMS sensor using LTI (linear time invariant) technique. Frequency fault model is developed to analyze the dynamic behavior of the device in term of displacement, frequency and output electrical response. First an analy...

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Main Authors: Shoaib, M., Hamid, N.H., Jan, M.T., Ali, N.B.Z.
Format: Article
Institution: Universiti Teknologi Petronas
Record Id / ISBN-0: utp-eprints.20203 /
Published: Institute of Electrical and Electronics Engineers Inc. 2017
Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012031841&doi=10.1109%2fICIAS.2016.7824083&partnerID=40&md5=5a14a5995838390ffefc46b25d78bd9b
http://eprints.utp.edu.my/20203/
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spelling utp-eprints.202032018-04-22T14:45:32Z Effects of edge cracks on the dynamics of piezoelectric cantilever based MEMS sensor Shoaib, M. Hamid, N.H. Jan, M.T. Ali, N.B.Z. This paper presents edge crack fault modeling for piezoelectric cantilever based MEMS sensor using LTI (linear time invariant) technique. Frequency fault model is developed to analyze the dynamic behavior of the device in term of displacement, frequency and output electrical response. First an analytical model is developed that shows the electromechanical coupling of the device. Crack function along with the dynamic mass is used to develop the resonance frequency of cracked cantilever. Then LTI model of faulty device is developed by integrating the analytical equations using Simulink tool. The LTI model is validated by comparing its results with the FEM design using same design parameters using COMSOL tool. The results shows that resonance frequency of the device is changed by changing the crack size and its location in the cantilever structure. © 2016 IEEE. Institute of Electrical and Electronics Engineers Inc. 2017 Article PeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012031841&doi=10.1109%2fICIAS.2016.7824083&partnerID=40&md5=5a14a5995838390ffefc46b25d78bd9b Shoaib, M. and Hamid, N.H. and Jan, M.T. and Ali, N.B.Z. (2017) Effects of edge cracks on the dynamics of piezoelectric cantilever based MEMS sensor. International Conference on Intelligent and Advanced Systems, ICIAS 2016 . http://eprints.utp.edu.my/20203/
institution Universiti Teknologi Petronas
collection UTP Institutional Repository
description This paper presents edge crack fault modeling for piezoelectric cantilever based MEMS sensor using LTI (linear time invariant) technique. Frequency fault model is developed to analyze the dynamic behavior of the device in term of displacement, frequency and output electrical response. First an analytical model is developed that shows the electromechanical coupling of the device. Crack function along with the dynamic mass is used to develop the resonance frequency of cracked cantilever. Then LTI model of faulty device is developed by integrating the analytical equations using Simulink tool. The LTI model is validated by comparing its results with the FEM design using same design parameters using COMSOL tool. The results shows that resonance frequency of the device is changed by changing the crack size and its location in the cantilever structure. © 2016 IEEE.
format Article
author Shoaib, M.
Hamid, N.H.
Jan, M.T.
Ali, N.B.Z.
spellingShingle Shoaib, M.
Hamid, N.H.
Jan, M.T.
Ali, N.B.Z.
Effects of edge cracks on the dynamics of piezoelectric cantilever based MEMS sensor
author_sort Shoaib, M.
title Effects of edge cracks on the dynamics of piezoelectric cantilever based MEMS sensor
title_short Effects of edge cracks on the dynamics of piezoelectric cantilever based MEMS sensor
title_full Effects of edge cracks on the dynamics of piezoelectric cantilever based MEMS sensor
title_fullStr Effects of edge cracks on the dynamics of piezoelectric cantilever based MEMS sensor
title_full_unstemmed Effects of edge cracks on the dynamics of piezoelectric cantilever based MEMS sensor
title_sort effects of edge cracks on the dynamics of piezoelectric cantilever based mems sensor
publisher Institute of Electrical and Electronics Engineers Inc.
publishDate 2017
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012031841&doi=10.1109%2fICIAS.2016.7824083&partnerID=40&md5=5a14a5995838390ffefc46b25d78bd9b
http://eprints.utp.edu.my/20203/
_version_ 1741196334212317184
score 11.62408

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