Estimation of SAW velocity and coupling coefficient in multilayered piezo-substrates AlN/SiO2/Si
In this study, the problem of estimating surface acoustic wave (SAW) velocity and coupling coefficient for multi-layered piezo-substrates is investigated in Aluminum Nitride/Silicon Dioxide/Silicon (AlN/SiO2/Si) using energy dissipation method. Assuming SAW energy lying within 10 times of wavelength...
| Main Authors: | Malik, A.F., Jeoti, V., Fawzy, M., Iqbal, A., Aslam, Z., Pandian, M.S., Marigo, E. |
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| Format: | Article |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.20231 / |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2017
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| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85011977793&doi=10.1109%2fICIAS.2016.7824112&partnerID=40&md5=3bca6f73bd7313952b44a1171fec7dfd http://eprints.utp.edu.my/20231/ |
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