Effects of frequency and voltage on the output of CMOS-MEMS device
This research work focuses on performance analysis of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device which has been designed and fabricated for humidity sensing purpose. The sensor was designed following the standard 0.35 μm CMOS technology. The device is...
| Main Authors: | Basuwaqi, A.M., Md Khir, M.H., Ahmed, A.Y., Rabih, A.A.S., Mian, M.U., Dennis, J.O. |
|---|---|
| Format: | Article |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.21778 / |
| Published: |
IEEE Computer Society
2018
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| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85046361410&doi=10.1109%2fPRIMEASIA.2017.8280361&partnerID=40&md5=e5d5b0fa7c33dfecbc4196bcda3e4416 http://eprints.utp.edu.my/21778/ |
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