Analytical modelling of the effect of squeeze film damping on the frequency and quality factor of a poly MUMPs resonator
This paper reports analytical modelling of the squeeze film damping effect of a standard Polysilicon Multi-Users MEMS Process (Poly MUMPs) resonators. Poly MUMPs resonator has been designed for the purpose of gas detection. Generally, damping is present in all vibrating systems in the real world wit...
| Main Authors: | Algamili, A., Ahmed, A., Dennis, J., Khir, M., Mutharpavalar, A. |
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| Format: | Article |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.23095 / |
| Published: |
Institute of Advanced Scientific Research, Inc.
2020
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| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85085321108&doi=10.5373%2fJARDCS%2fV12SP4%2f20201644&partnerID=40&md5=dfd4ef7f7e98a3e220bef9d0972ffa39 http://eprints.utp.edu.my/23095/ |
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