Modeling and Finite Element Analysis Simulation of MEMS Based Acetone Vapor Sensor for Noninvasive Screening of Diabetes

Diabetes is currently screened invasively by measuring glucose concentration in blood, which is inconvenient. This paper reports a study on modeling and simulation of a CMOS-MEMS sensor for noninvasive screening of diabetes via detection of acetone vapor in exhaled breath (EB). The sensor has two st...

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Main Authors: Dennis, J.O., Rabih, A.A.S., Md Khir, M.H., Ahmed, M.G.A., Ahmed, A.Y.
Format: Article
Institution: Universiti Teknologi Petronas
Record Id / ISBN-0: utp-eprints.25508 /
Published: Hindawi Limited 2016
Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84973313943&doi=10.1155%2f2016%2f9563938&partnerID=40&md5=10730339d6d758e8e3dc2b0bc09f9d70
http://eprints.utp.edu.my/25508/
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spelling utp-eprints.255082021-08-27T13:03:23Z Modeling and Finite Element Analysis Simulation of MEMS Based Acetone Vapor Sensor for Noninvasive Screening of Diabetes Dennis, J.O. Rabih, A.A.S. Md Khir, M.H. Ahmed, M.G.A. Ahmed, A.Y. Diabetes is currently screened invasively by measuring glucose concentration in blood, which is inconvenient. This paper reports a study on modeling and simulation of a CMOS-MEMS sensor for noninvasive screening of diabetes via detection of acetone vapor in exhaled breath (EB). The sensor has two structures: movable (rotor) and fixed (stator) plates. The rotor plate is suspended on top of the stator by support of four flexible beams and maintaining certain selected initial gaps of 5, 6, 7, 8, 9, 10, or 11 μm to form actuation and sensing parallel plate capacitors. A chitosan polymer of varied thicknesses (1-20 μm) is deposited on the rotor plate and modeled as a sensing element for the acetone vapor. The minimum polymer coating thickness required to detect the critical concentration (1.8 ppm) of acetone vapor in the EB of diabetic subjects is found to be 4-7 μm, depending on the initial gap between the rotor and stator plates. However, to achieve sub-ppm detection limit to sense the acetone vapor concentration (0.4-1.1 ppm) in the EB of healthy people, up to 20 μm polymer thickness is coated. The mathematically modeled results were verified using the 2008 CoventorWare simulation software and a good agreement within a 5.3 error was found between the modeled and the simulated frequencies giving more confidence in the predicted results. © 2016 John Ojur Dennis et al. Hindawi Limited 2016 Article NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84973313943&doi=10.1155%2f2016%2f9563938&partnerID=40&md5=10730339d6d758e8e3dc2b0bc09f9d70 Dennis, J.O. and Rabih, A.A.S. and Md Khir, M.H. and Ahmed, M.G.A. and Ahmed, A.Y. (2016) Modeling and Finite Element Analysis Simulation of MEMS Based Acetone Vapor Sensor for Noninvasive Screening of Diabetes. Journal of Sensors, 2016 . http://eprints.utp.edu.my/25508/
institution Universiti Teknologi Petronas
collection UTP Institutional Repository
description Diabetes is currently screened invasively by measuring glucose concentration in blood, which is inconvenient. This paper reports a study on modeling and simulation of a CMOS-MEMS sensor for noninvasive screening of diabetes via detection of acetone vapor in exhaled breath (EB). The sensor has two structures: movable (rotor) and fixed (stator) plates. The rotor plate is suspended on top of the stator by support of four flexible beams and maintaining certain selected initial gaps of 5, 6, 7, 8, 9, 10, or 11 μm to form actuation and sensing parallel plate capacitors. A chitosan polymer of varied thicknesses (1-20 μm) is deposited on the rotor plate and modeled as a sensing element for the acetone vapor. The minimum polymer coating thickness required to detect the critical concentration (1.8 ppm) of acetone vapor in the EB of diabetic subjects is found to be 4-7 μm, depending on the initial gap between the rotor and stator plates. However, to achieve sub-ppm detection limit to sense the acetone vapor concentration (0.4-1.1 ppm) in the EB of healthy people, up to 20 μm polymer thickness is coated. The mathematically modeled results were verified using the 2008 CoventorWare simulation software and a good agreement within a 5.3 error was found between the modeled and the simulated frequencies giving more confidence in the predicted results. © 2016 John Ojur Dennis et al.
format Article
author Dennis, J.O.
Rabih, A.A.S.
Md Khir, M.H.
Ahmed, M.G.A.
Ahmed, A.Y.
spellingShingle Dennis, J.O.
Rabih, A.A.S.
Md Khir, M.H.
Ahmed, M.G.A.
Ahmed, A.Y.
Modeling and Finite Element Analysis Simulation of MEMS Based Acetone Vapor Sensor for Noninvasive Screening of Diabetes
author_sort Dennis, J.O.
title Modeling and Finite Element Analysis Simulation of MEMS Based Acetone Vapor Sensor for Noninvasive Screening of Diabetes
title_short Modeling and Finite Element Analysis Simulation of MEMS Based Acetone Vapor Sensor for Noninvasive Screening of Diabetes
title_full Modeling and Finite Element Analysis Simulation of MEMS Based Acetone Vapor Sensor for Noninvasive Screening of Diabetes
title_fullStr Modeling and Finite Element Analysis Simulation of MEMS Based Acetone Vapor Sensor for Noninvasive Screening of Diabetes
title_full_unstemmed Modeling and Finite Element Analysis Simulation of MEMS Based Acetone Vapor Sensor for Noninvasive Screening of Diabetes
title_sort modeling and finite element analysis simulation of mems based acetone vapor sensor for noninvasive screening of diabetes
publisher Hindawi Limited
publishDate 2016
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-84973313943&doi=10.1155%2f2016%2f9563938&partnerID=40&md5=10730339d6d758e8e3dc2b0bc09f9d70
http://eprints.utp.edu.my/25508/
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score 11.62408

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