Test of a new tip material for Langmuir probe diagnostic
The objective of the work is to test a nickel�chrome alloy as a probe tip material for characterization of discharge plasmas. In order to meet the objective, a symmetric triple Langmuir probe diagnostic system and an associated driving circuit are designed and tested in an inductively coupled plas...
| Main Authors: | Naz, M.Y., Shukrullah, S., Ghaffar, A., Rehman, N.U., Khan, Y. |
|---|---|
| Format: | Article |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.25581 / |
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Maik Nauka-Interperiodica Publishing
2016
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https://www.scopus.com/inward/record.uri?eid=2-s2.0-84976315637&doi=10.1134%2fS0021894416020036&partnerID=40&md5=6648e60fd97475eb0ecef5599ce3a009 http://eprints.utp.edu.my/25581/ |
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utp-eprints.255812021-08-27T09:18:25Z Test of a new tip material for Langmuir probe diagnostic Naz, M.Y. Shukrullah, S. Ghaffar, A. Rehman, N.U. Khan, Y. The objective of the work is to test a nickel�chrome alloy as a probe tip material for characterization of discharge plasmas. In order to meet the objective, a symmetric triple Langmuir probe diagnostic system and an associated driving circuit are designed and tested in an inductively coupled plasma generated by a 13.56-MHz radio frequency source coupled with an automated impedance match network. This probe is used to measure the electron temperature, electron number density, and ion saturation current as functions of the input power of the radio frequency source and the filling gas pressure. An increasing trend is noticed in the electron temperature and electron number density with an increase in the input power, whilst a decreasing trend is evident in these parameters with an increase in the nitrogen gas pressure. The overall inaccuracies in electron temperature and electron number density measurements are 5�12 and 3�13, respectively. © 2016, Pleiades Publishing, Ltd. Maik Nauka-Interperiodica Publishing 2016 Article NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84976315637&doi=10.1134%2fS0021894416020036&partnerID=40&md5=6648e60fd97475eb0ecef5599ce3a009 Naz, M.Y. and Shukrullah, S. and Ghaffar, A. and Rehman, N.U. and Khan, Y. (2016) Test of a new tip material for Langmuir probe diagnostic. Journal of Applied Mechanics and Technical Physics, 57 (2). pp. 211-218. http://eprints.utp.edu.my/25581/ |
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Universiti Teknologi Petronas |
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UTP Institutional Repository |
| description |
The objective of the work is to test a nickel�chrome alloy as a probe tip material for characterization of discharge plasmas. In order to meet the objective, a symmetric triple Langmuir probe diagnostic system and an associated driving circuit are designed and tested in an inductively coupled plasma generated by a 13.56-MHz radio frequency source coupled with an automated impedance match network. This probe is used to measure the electron temperature, electron number density, and ion saturation current as functions of the input power of the radio frequency source and the filling gas pressure. An increasing trend is noticed in the electron temperature and electron number density with an increase in the input power, whilst a decreasing trend is evident in these parameters with an increase in the nitrogen gas pressure. The overall inaccuracies in electron temperature and electron number density measurements are 5�12 and 3�13, respectively. © 2016, Pleiades Publishing, Ltd. |
| format |
Article |
| author |
Naz, M.Y. Shukrullah, S. Ghaffar, A. Rehman, N.U. Khan, Y. |
| spellingShingle |
Naz, M.Y. Shukrullah, S. Ghaffar, A. Rehman, N.U. Khan, Y. Test of a new tip material for Langmuir probe diagnostic |
| author_sort |
Naz, M.Y. |
| title |
Test of a new tip material for Langmuir probe diagnostic |
| title_short |
Test of a new tip material for Langmuir probe diagnostic |
| title_full |
Test of a new tip material for Langmuir probe diagnostic |
| title_fullStr |
Test of a new tip material for Langmuir probe diagnostic |
| title_full_unstemmed |
Test of a new tip material for Langmuir probe diagnostic |
| title_sort |
test of a new tip material for langmuir probe diagnostic |
| publisher |
Maik Nauka-Interperiodica Publishing |
| publishDate |
2016 |
| url |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84976315637&doi=10.1134%2fS0021894416020036&partnerID=40&md5=6648e60fd97475eb0ecef5599ce3a009 http://eprints.utp.edu.my/25581/ |
| _version_ |
1741196997694586880 |
| score |
11.62408 |