CMOS-MEMS thermoelectric generator for low power medical devices

This paper presents the design and simulation of a new concept of CMOS-MEMS thermoelectric generator (TEG) capable of converting thermal energy into electrical energy for use in low power medical devices. The TEG is designed with three unique features that will ensure optimum heat transfer that resu...

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Main Authors: Rahman, Z.H.A., Khir, M.H.Md., Burhanudin, Z.A.
Format: Conference or Workshop Item
Institution: Universiti Teknologi Petronas
Record Id / ISBN-0: utp-eprints.26180 /
Published: Institute of Electrical and Electronics Engineers Inc. 2015
Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84963891910&doi=10.1109%2fRSM.2015.7354965&partnerID=40&md5=5c20bb2c310a670f50238bfc779c280d
http://eprints.utp.edu.my/26180/
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spelling utp-eprints.261802021-08-30T08:53:49Z CMOS-MEMS thermoelectric generator for low power medical devices Rahman, Z.H.A. Khir, M.H.Md. Burhanudin, Z.A. This paper presents the design and simulation of a new concept of CMOS-MEMS thermoelectric generator (TEG) capable of converting thermal energy into electrical energy for use in low power medical devices. The TEG is designed with three unique features that will ensure optimum heat transfer that result in achievement of larger temperature difference between two junctions. First, a thicker dielectric layer is designed between two metal layers. Second, trenches isolation is introduced to isolate the hot and cold junction area. Third, thermal insulator and heat sink layer are deposited on the top surface of the TEG at the hot and cold junction area, respectively. Based on the simulation results of these three abovementioned features, a device with size of 25 mm2 consisting of 1712 thermocouples with 5 K temperature difference between two sides, is capable of producing output voltage and power of 3.294 V and 0.925 μW, respectively. Voltage factor is 2.635 Vcm-2K-1 and power factor is 0.148 μWcm-2K-2. © 2015 IEEE. Institute of Electrical and Electronics Engineers Inc. 2015 Conference or Workshop Item NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84963891910&doi=10.1109%2fRSM.2015.7354965&partnerID=40&md5=5c20bb2c310a670f50238bfc779c280d Rahman, Z.H.A. and Khir, M.H.Md. and Burhanudin, Z.A. (2015) CMOS-MEMS thermoelectric generator for low power medical devices. In: UNSPECIFIED. http://eprints.utp.edu.my/26180/
institution Universiti Teknologi Petronas
collection UTP Institutional Repository
description This paper presents the design and simulation of a new concept of CMOS-MEMS thermoelectric generator (TEG) capable of converting thermal energy into electrical energy for use in low power medical devices. The TEG is designed with three unique features that will ensure optimum heat transfer that result in achievement of larger temperature difference between two junctions. First, a thicker dielectric layer is designed between two metal layers. Second, trenches isolation is introduced to isolate the hot and cold junction area. Third, thermal insulator and heat sink layer are deposited on the top surface of the TEG at the hot and cold junction area, respectively. Based on the simulation results of these three abovementioned features, a device with size of 25 mm2 consisting of 1712 thermocouples with 5 K temperature difference between two sides, is capable of producing output voltage and power of 3.294 V and 0.925 μW, respectively. Voltage factor is 2.635 Vcm-2K-1 and power factor is 0.148 μWcm-2K-2. © 2015 IEEE.
format Conference or Workshop Item
author Rahman, Z.H.A.
Khir, M.H.Md.
Burhanudin, Z.A.
spellingShingle Rahman, Z.H.A.
Khir, M.H.Md.
Burhanudin, Z.A.
CMOS-MEMS thermoelectric generator for low power medical devices
author_sort Rahman, Z.H.A.
title CMOS-MEMS thermoelectric generator for low power medical devices
title_short CMOS-MEMS thermoelectric generator for low power medical devices
title_full CMOS-MEMS thermoelectric generator for low power medical devices
title_fullStr CMOS-MEMS thermoelectric generator for low power medical devices
title_full_unstemmed CMOS-MEMS thermoelectric generator for low power medical devices
title_sort cmos-mems thermoelectric generator for low power medical devices
publisher Institute of Electrical and Electronics Engineers Inc.
publishDate 2015
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-84963891910&doi=10.1109%2fRSM.2015.7354965&partnerID=40&md5=5c20bb2c310a670f50238bfc779c280d
http://eprints.utp.edu.my/26180/
_version_ 1741197096071987200
score 11.62408

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