Characterization of CMOS-MEMS device for acetone vapor detection in exhaled breath

A MEMS vapor sensor for acetone detection in exhaled breath (EB) has been fabricated using 0.35 μm CMOS technology. Acetone vapor in EB is used as a non-invasive method for diabetes screening, which is currently conducted invasively by measuring blood glucose in blood. This paper studies the charac...

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Main Authors: Rabih, A.A.S., Khir, M.H.M., Ahmed, A.Y., Ahmed, M.G.A., Dennis, J.O.
Format: Conference or Workshop Item
Institution: Universiti Teknologi Petronas
Record Id / ISBN-0: utp-eprints.26181 /
Published: Institute of Electrical and Electronics Engineers Inc. 2015
Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84963820501&doi=10.1109%2fRSM.2015.7354966&partnerID=40&md5=1af2e2d86add3285df36efb146dd3745
http://eprints.utp.edu.my/26181/
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id utp-eprints.26181
recordtype eprints
spelling utp-eprints.261812021-08-30T08:53:50Z Characterization of CMOS-MEMS device for acetone vapor detection in exhaled breath Rabih, A.A.S. Khir, M.H.M. Ahmed, A.Y. Ahmed, M.G.A. Dennis, J.O. A MEMS vapor sensor for acetone detection in exhaled breath (EB) has been fabricated using 0.35 μm CMOS technology. Acetone vapor in EB is used as a non-invasive method for diabetes screening, which is currently conducted invasively by measuring blood glucose in blood. This paper studies the characterization of polysilicon piezoresistors, heater and temperature sensor embedded in the device. The measured resistances were found to be close to the modelled values within 1.1-6.8 error. Temperature coefficient of resistance (TCR) of the temperature sensor in a range of 25-100°C was found. TCR increases linearly with increasing the temperature and decreases linearly with decreasing the temperature. It was found to be 0.0033/°C for the increasing temperature and 0.0034/°C for the decreasing temperature, compared to 0.0038/°C reported in the literature, with an error of 13 and 10.5, respectively. © 2015 IEEE. Institute of Electrical and Electronics Engineers Inc. 2015 Conference or Workshop Item NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84963820501&doi=10.1109%2fRSM.2015.7354966&partnerID=40&md5=1af2e2d86add3285df36efb146dd3745 Rabih, A.A.S. and Khir, M.H.M. and Ahmed, A.Y. and Ahmed, M.G.A. and Dennis, J.O. (2015) Characterization of CMOS-MEMS device for acetone vapor detection in exhaled breath. In: UNSPECIFIED. http://eprints.utp.edu.my/26181/
institution Universiti Teknologi Petronas
collection UTP Institutional Repository
description A MEMS vapor sensor for acetone detection in exhaled breath (EB) has been fabricated using 0.35 μm CMOS technology. Acetone vapor in EB is used as a non-invasive method for diabetes screening, which is currently conducted invasively by measuring blood glucose in blood. This paper studies the characterization of polysilicon piezoresistors, heater and temperature sensor embedded in the device. The measured resistances were found to be close to the modelled values within 1.1-6.8 error. Temperature coefficient of resistance (TCR) of the temperature sensor in a range of 25-100°C was found. TCR increases linearly with increasing the temperature and decreases linearly with decreasing the temperature. It was found to be 0.0033/°C for the increasing temperature and 0.0034/°C for the decreasing temperature, compared to 0.0038/°C reported in the literature, with an error of 13 and 10.5, respectively. © 2015 IEEE.
format Conference or Workshop Item
author Rabih, A.A.S.
Khir, M.H.M.
Ahmed, A.Y.
Ahmed, M.G.A.
Dennis, J.O.
spellingShingle Rabih, A.A.S.
Khir, M.H.M.
Ahmed, A.Y.
Ahmed, M.G.A.
Dennis, J.O.
Characterization of CMOS-MEMS device for acetone vapor detection in exhaled breath
author_sort Rabih, A.A.S.
title Characterization of CMOS-MEMS device for acetone vapor detection in exhaled breath
title_short Characterization of CMOS-MEMS device for acetone vapor detection in exhaled breath
title_full Characterization of CMOS-MEMS device for acetone vapor detection in exhaled breath
title_fullStr Characterization of CMOS-MEMS device for acetone vapor detection in exhaled breath
title_full_unstemmed Characterization of CMOS-MEMS device for acetone vapor detection in exhaled breath
title_sort characterization of cmos-mems device for acetone vapor detection in exhaled breath
publisher Institute of Electrical and Electronics Engineers Inc.
publishDate 2015
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-84963820501&doi=10.1109%2fRSM.2015.7354966&partnerID=40&md5=1af2e2d86add3285df36efb146dd3745
http://eprints.utp.edu.my/26181/
_version_ 1741197096231370752
score 11.62408

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