Modeling and simulation of polysilicon piezoresistors in a CMOS-MEMS resonator for mass detection
This paper reports modeling and simulation of polysilicon piezoresistors as sensing mechanism using commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The CMOS-MEMS resonator is designed to detect change in mass. The designed piezoresistors are composed of two types; longitu...
| Main Authors: | Gafare, M., Khir, M.H.M., Rabih, A., Ahmed, A., Dennis, J.O. |
|---|---|
| Format: | Conference or Workshop Item |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.26182 / |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2015
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| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84963811379&doi=10.1109%2fRSM.2015.7354957&partnerID=40&md5=ea763e79eeded8040cad021e4666a13e http://eprints.utp.edu.my/26182/ |
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