A monolithic, low-noise, capacitive readout interface circuit for CMOS-MEMS resonator-based gravimetric chemical gas sensors

This paper presents a monolithic, low-noise capacitive readout interface circuit for CMOS-MEMS resonator based gravimetric chemical gas sensors. In these sensor devices, where the sense capacitances are usually very weak, the readout interface circuit plays a crucial role in determining the overall...

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Main Authors: Sutri, N.Y., Dennis, J.O., Khir, M.H.M., Ahmed, A.Y., Mian, M.U.
Format: Conference or Workshop Item
Institution: Universiti Teknologi Petronas
Record Id / ISBN-0: utp-eprints.26189 /
Published: Institute of Electrical and Electronics Engineers Inc. 2015
Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84962581641&doi=10.1109%2fAFRCON.2015.7332004&partnerID=40&md5=5f22f8b5a414cdb5f8e684858a39d655
http://eprints.utp.edu.my/26189/
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spelling utp-eprints.261892021-08-30T08:54:04Z A monolithic, low-noise, capacitive readout interface circuit for CMOS-MEMS resonator-based gravimetric chemical gas sensors Sutri, N.Y. Dennis, J.O. Khir, M.H.M. Ahmed, A.Y. Mian, M.U. This paper presents a monolithic, low-noise capacitive readout interface circuit for CMOS-MEMS resonator based gravimetric chemical gas sensors. In these sensor devices, where the sense capacitances are usually very weak, the readout interface circuit plays a crucial role in determining the overall sensor performance. Noise is observed in various active and passive devices affecting circuit performances. Particularly at low frequencies, flicker noise is dominant in degrading the quality of output signals. A dual stage, open-loop continuous time voltage sensing with chopper stabilization technique is proposed in this work to cope with it and improve the total output signal SNR. The proposed circuit is designed based on MIMOS 0.35 μm AMS 3.3V CMOS technology. Cadence Spectre circuit simulator simulation results show, the proposed circuit achieves an input inferred noise of 11.6 n V/�Hz, total gain of 48.1 dB and consumes a total power of 3.385 mW. The designed circuit is able to detect minute capacitance changes as low as 0.0365 aF with total sensitivity of 67.95 μV/aF. © 2015 IEEE. Institute of Electrical and Electronics Engineers Inc. 2015 Conference or Workshop Item NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84962581641&doi=10.1109%2fAFRCON.2015.7332004&partnerID=40&md5=5f22f8b5a414cdb5f8e684858a39d655 Sutri, N.Y. and Dennis, J.O. and Khir, M.H.M. and Ahmed, A.Y. and Mian, M.U. (2015) A monolithic, low-noise, capacitive readout interface circuit for CMOS-MEMS resonator-based gravimetric chemical gas sensors. In: UNSPECIFIED. http://eprints.utp.edu.my/26189/
institution Universiti Teknologi Petronas
collection UTP Institutional Repository
description This paper presents a monolithic, low-noise capacitive readout interface circuit for CMOS-MEMS resonator based gravimetric chemical gas sensors. In these sensor devices, where the sense capacitances are usually very weak, the readout interface circuit plays a crucial role in determining the overall sensor performance. Noise is observed in various active and passive devices affecting circuit performances. Particularly at low frequencies, flicker noise is dominant in degrading the quality of output signals. A dual stage, open-loop continuous time voltage sensing with chopper stabilization technique is proposed in this work to cope with it and improve the total output signal SNR. The proposed circuit is designed based on MIMOS 0.35 μm AMS 3.3V CMOS technology. Cadence Spectre circuit simulator simulation results show, the proposed circuit achieves an input inferred noise of 11.6 n V/�Hz, total gain of 48.1 dB and consumes a total power of 3.385 mW. The designed circuit is able to detect minute capacitance changes as low as 0.0365 aF with total sensitivity of 67.95 μV/aF. © 2015 IEEE.
format Conference or Workshop Item
author Sutri, N.Y.
Dennis, J.O.
Khir, M.H.M.
Ahmed, A.Y.
Mian, M.U.
spellingShingle Sutri, N.Y.
Dennis, J.O.
Khir, M.H.M.
Ahmed, A.Y.
Mian, M.U.
A monolithic, low-noise, capacitive readout interface circuit for CMOS-MEMS resonator-based gravimetric chemical gas sensors
author_sort Sutri, N.Y.
title A monolithic, low-noise, capacitive readout interface circuit for CMOS-MEMS resonator-based gravimetric chemical gas sensors
title_short A monolithic, low-noise, capacitive readout interface circuit for CMOS-MEMS resonator-based gravimetric chemical gas sensors
title_full A monolithic, low-noise, capacitive readout interface circuit for CMOS-MEMS resonator-based gravimetric chemical gas sensors
title_fullStr A monolithic, low-noise, capacitive readout interface circuit for CMOS-MEMS resonator-based gravimetric chemical gas sensors
title_full_unstemmed A monolithic, low-noise, capacitive readout interface circuit for CMOS-MEMS resonator-based gravimetric chemical gas sensors
title_sort monolithic, low-noise, capacitive readout interface circuit for cmos-mems resonator-based gravimetric chemical gas sensors
publisher Institute of Electrical and Electronics Engineers Inc.
publishDate 2015
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-84962581641&doi=10.1109%2fAFRCON.2015.7332004&partnerID=40&md5=5f22f8b5a414cdb5f8e684858a39d655
http://eprints.utp.edu.my/26189/
_version_ 1741197097509584896
score 11.62408

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