Frequency analysis of electrostatic cantilever-based MEMS sensor

This paper presents an analytical approach to model the dynamic behavior and predict the frequency of electrostatic cantilever based MEMS (Microelectromechanical system) sensor for mass detection. The concept of dynamic mass is used to formulate the resonance frequency in damped and undamped medium....

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Main Authors: Shoaib, M., Hisham, N., Basheer, N., Tariq, M.
Format: Conference or Workshop Item
Institution: Universiti Teknologi Petronas
Record Id / ISBN-0: utp-eprints.26227 /
Published: Institute of Electrical and Electronics Engineers Inc. 2015
Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84945943332&doi=10.1109%2fDTIP.2015.7161013&partnerID=40&md5=3c5cea622071e3a88600330fcba59298
http://eprints.utp.edu.my/26227/
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spelling utp-eprints.262272021-08-30T08:55:02Z Frequency analysis of electrostatic cantilever-based MEMS sensor Shoaib, M. Hisham, N. Basheer, N. Tariq, M. This paper presents an analytical approach to model the dynamic behavior and predict the frequency of electrostatic cantilever based MEMS (Microelectromechanical system) sensor for mass detection. The concept of dynamic mass is used to formulate the resonance frequency in damped and undamped medium. In the modeling, electrostatic force is coupled with the bending moment of cantilever to produce actuation at a resonance frequency. Mass of blood cells is used as an external load on the cantilever which results in shift in resonance frequency. This shift due to additional mass is sensed by the piezoresistive mechanism. The device analytical model is integrated using Simulink tool to study the dynamic behavior. The same device is then designed using COMSOL tool and FEM analysis is performed. The analytical results are compared with the simulated results. © 2015 IEEE. Institute of Electrical and Electronics Engineers Inc. 2015 Conference or Workshop Item NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84945943332&doi=10.1109%2fDTIP.2015.7161013&partnerID=40&md5=3c5cea622071e3a88600330fcba59298 Shoaib, M. and Hisham, N. and Basheer, N. and Tariq, M. (2015) Frequency analysis of electrostatic cantilever-based MEMS sensor. In: UNSPECIFIED. http://eprints.utp.edu.my/26227/
institution Universiti Teknologi Petronas
collection UTP Institutional Repository
description This paper presents an analytical approach to model the dynamic behavior and predict the frequency of electrostatic cantilever based MEMS (Microelectromechanical system) sensor for mass detection. The concept of dynamic mass is used to formulate the resonance frequency in damped and undamped medium. In the modeling, electrostatic force is coupled with the bending moment of cantilever to produce actuation at a resonance frequency. Mass of blood cells is used as an external load on the cantilever which results in shift in resonance frequency. This shift due to additional mass is sensed by the piezoresistive mechanism. The device analytical model is integrated using Simulink tool to study the dynamic behavior. The same device is then designed using COMSOL tool and FEM analysis is performed. The analytical results are compared with the simulated results. © 2015 IEEE.
format Conference or Workshop Item
author Shoaib, M.
Hisham, N.
Basheer, N.
Tariq, M.
spellingShingle Shoaib, M.
Hisham, N.
Basheer, N.
Tariq, M.
Frequency analysis of electrostatic cantilever-based MEMS sensor
author_sort Shoaib, M.
title Frequency analysis of electrostatic cantilever-based MEMS sensor
title_short Frequency analysis of electrostatic cantilever-based MEMS sensor
title_full Frequency analysis of electrostatic cantilever-based MEMS sensor
title_fullStr Frequency analysis of electrostatic cantilever-based MEMS sensor
title_full_unstemmed Frequency analysis of electrostatic cantilever-based MEMS sensor
title_sort frequency analysis of electrostatic cantilever-based mems sensor
publisher Institute of Electrical and Electronics Engineers Inc.
publishDate 2015
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-84945943332&doi=10.1109%2fDTIP.2015.7161013&partnerID=40&md5=3c5cea622071e3a88600330fcba59298
http://eprints.utp.edu.my/26227/
_version_ 1741197103980347392
score 11.62408

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