Implementation of capacitance as simultaneous sensing and actuating tool in tapered microelectrode arrays for dielectrophoresis-on-a-chip application
Purpose: This paper aims to present the capacitance characterization of tapered dielectrophoresis (DEP) microelectrodes as micro-electro-mechanical system sensor and actuator device. The application of DEP-on-a-chip (DOC) can be used to evaluate and correlate the capacitive sensing measurement at an...
| Main Authors: | Buyong, M.R., Larki, F., Hakimi Zainal, M.I., Almahi, A.Y.A., Ismail, A.G., Hamzah, A.A., Kayani, A.A.K., Caille, C.E., Yeop Majlis, B. |
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| Format: | Article |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.29964 / |
| Published: |
Emerald Group Holdings Ltd.
2020
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| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85091315300&doi=10.1108%2fMI-04-2020-0023&partnerID=40&md5=fcb12da9dd8676801e336a136810c42f http://eprints.utp.edu.my/29964/ |
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