A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into a...

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Main Authors: Algamili, A.S., Khir, M.H.M., Dennis, J.O., Ahmed, A.Y., Alabsi, S.S., Ba Hashwan, S.S., Junaid, M.M.
Format: Article
Institution: Universiti Teknologi Petronas
Record Id / ISBN-0: utp-eprints.30423 /
Published: Springer 2021
Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85099885961&doi=10.1186%2fs11671-021-03481-7&partnerID=40&md5=e9c930595c8927b6fe8c2069db0d2925
http://eprints.utp.edu.my/30423/
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spelling utp-eprints.304232022-03-25T06:51:37Z A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices Algamili, A.S. Khir, M.H.M. Dennis, J.O. Ahmed, A.Y. Alabsi, S.S. Ba Hashwan, S.S. Junaid, M.M. Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design. © 2021, The Author(s). Springer 2021 Article NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-85099885961&doi=10.1186%2fs11671-021-03481-7&partnerID=40&md5=e9c930595c8927b6fe8c2069db0d2925 Algamili, A.S. and Khir, M.H.M. and Dennis, J.O. and Ahmed, A.Y. and Alabsi, S.S. and Ba Hashwan, S.S. and Junaid, M.M. (2021) A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices. Nanoscale Research Letters, 16 (1). http://eprints.utp.edu.my/30423/
institution Universiti Teknologi Petronas
collection UTP Institutional Repository
description Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design. © 2021, The Author(s).
format Article
author Algamili, A.S.
Khir, M.H.M.
Dennis, J.O.
Ahmed, A.Y.
Alabsi, S.S.
Ba Hashwan, S.S.
Junaid, M.M.
spellingShingle Algamili, A.S.
Khir, M.H.M.
Dennis, J.O.
Ahmed, A.Y.
Alabsi, S.S.
Ba Hashwan, S.S.
Junaid, M.M.
A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
author_sort Algamili, A.S.
title A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
title_short A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
title_full A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
title_fullStr A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
title_full_unstemmed A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
title_sort review of actuation and sensing mechanisms in mems-based sensor devices
publisher Springer
publishDate 2021
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-85099885961&doi=10.1186%2fs11671-021-03481-7&partnerID=40&md5=e9c930595c8927b6fe8c2069db0d2925
http://eprints.utp.edu.my/30423/
_version_ 1741197403533344768
score 11.62408

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