Characterization of PolyMUMPs-based in-plane electromagnetic actuator
This paper presents a synopsis of the design and fabrication of an in-plane electromagnetic actuator using Polysilicon Multi-Users MEMS Process (PolyMUMPs). The electromagnetic actuator is driven by Lorentz force. This article is based on the premise that the proportionality of Lorentz force to magn...
| Main Authors: | Ahmed, M.G., Dennis, J.-O., Khir, M.-H., Rabih, A., Mian, M.U. |
|---|---|
| Format: | Conference or Workshop Item |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.30646 / |
| Published: |
American Institute of Physics Inc.
2016
|
| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85005974420&doi=10.1063%2f1.4968112&partnerID=40&md5=3e4bcd1793302088939a9aabe18fb028 http://eprints.utp.edu.my/30646/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|