A CMOS-MEMS cantilever sensor for capnometric applications

Capnometers monitor the concentration of CO2 in exhaled breath, which can be a life saving modality. High cost, big size and high power consumption of the conventional capnometers limit their scope and adaption. To overcome these issues, a CMOS MEMS microcantilever based CO2 sensor is proposed for c...

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Main Authors: Mirza, A., Hamid, N.H., Khir, M.H.M., Dennis, J.O., Ashraf, K., Shoaib, M., Jan, M.T.
Format: Article
Institution: Universiti Teknologi Petronas
Record Id / ISBN-0: utp-eprints.31276 /
Published: Institute of Electronics Information Communication Engineers 2014
Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84900521628&doi=10.1587%2felex.11.20140113&partnerID=40&md5=bf18bd760b5b4d250ad477294ce20469
http://eprints.utp.edu.my/31276/
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spelling utp-eprints.312762022-03-25T09:05:04Z A CMOS-MEMS cantilever sensor for capnometric applications Mirza, A. Hamid, N.H. Khir, M.H.M. Dennis, J.O. Ashraf, K. Shoaib, M. Jan, M.T. Capnometers monitor the concentration of CO2 in exhaled breath, which can be a life saving modality. High cost, big size and high power consumption of the conventional capnometers limit their scope and adaption. To overcome these issues, a CMOS MEMS microcantilever based CO2 sensor is proposed for capnometric applications. The microcantilever is manufactured using CMOS MEMS technology and its critical parameters are analytically investigated. The optimized microcantilever has a quality factor, sensitivity and resolution of 3116, 16 mHz/ppm and 0.31 ppb, respectively. © IEICE 2014. Institute of Electronics Information Communication Engineers 2014 Article NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84900521628&doi=10.1587%2felex.11.20140113&partnerID=40&md5=bf18bd760b5b4d250ad477294ce20469 Mirza, A. and Hamid, N.H. and Khir, M.H.M. and Dennis, J.O. and Ashraf, K. and Shoaib, M. and Jan, M.T. (2014) A CMOS-MEMS cantilever sensor for capnometric applications. IEICE Electronics Express, 11 (9). http://eprints.utp.edu.my/31276/
institution Universiti Teknologi Petronas
collection UTP Institutional Repository
description Capnometers monitor the concentration of CO2 in exhaled breath, which can be a life saving modality. High cost, big size and high power consumption of the conventional capnometers limit their scope and adaption. To overcome these issues, a CMOS MEMS microcantilever based CO2 sensor is proposed for capnometric applications. The microcantilever is manufactured using CMOS MEMS technology and its critical parameters are analytically investigated. The optimized microcantilever has a quality factor, sensitivity and resolution of 3116, 16 mHz/ppm and 0.31 ppb, respectively. © IEICE 2014.
format Article
author Mirza, A.
Hamid, N.H.
Khir, M.H.M.
Dennis, J.O.
Ashraf, K.
Shoaib, M.
Jan, M.T.
spellingShingle Mirza, A.
Hamid, N.H.
Khir, M.H.M.
Dennis, J.O.
Ashraf, K.
Shoaib, M.
Jan, M.T.
A CMOS-MEMS cantilever sensor for capnometric applications
author_sort Mirza, A.
title A CMOS-MEMS cantilever sensor for capnometric applications
title_short A CMOS-MEMS cantilever sensor for capnometric applications
title_full A CMOS-MEMS cantilever sensor for capnometric applications
title_fullStr A CMOS-MEMS cantilever sensor for capnometric applications
title_full_unstemmed A CMOS-MEMS cantilever sensor for capnometric applications
title_sort cmos-mems cantilever sensor for capnometric applications
publisher Institute of Electronics Information Communication Engineers
publishDate 2014
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-84900521628&doi=10.1587%2felex.11.20140113&partnerID=40&md5=bf18bd760b5b4d250ad477294ce20469
http://eprints.utp.edu.my/31276/
_version_ 1741197547317231616
score 11.62408

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