Development of simple designs of multitip probe diagnostic systems for RF plasma characterization

Multitip probes are very useful diagnostics for analyzing and controlling the physical phenomena occurring in low temperature discharge plasmas. However, DC biased probes often fail to perform well in processing plasmas. The objective of the work was to deduce simple designs of DC biased multitip pr...

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Main Authors: Naz, M.Y., Shukrullah, S., Ghaffar, A., Rehman, N.U.
Format: Article
Institution: Universiti Teknologi Petronas
Record Id / ISBN-0: utp-eprints.31327 /
Published: 2014
Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84896884076&doi=10.1155%2f2014%2f279868&partnerID=40&md5=ea93f458d23a6830df298d102f512d02
http://eprints.utp.edu.my/31327/
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spelling utp-eprints.313272022-03-25T09:06:11Z Development of simple designs of multitip probe diagnostic systems for RF plasma characterization Naz, M.Y. Shukrullah, S. Ghaffar, A. Rehman, N.U. Multitip probes are very useful diagnostics for analyzing and controlling the physical phenomena occurring in low temperature discharge plasmas. However, DC biased probes often fail to perform well in processing plasmas. The objective of the work was to deduce simple designs of DC biased multitip probes for parametric study of radio frequency plasmas. For this purpose, symmetric double probe, asymmetric double probe, and symmetric triple probe diagnostic systems and their driving circuits were designed and tested in an inductively coupled plasma (ICP) generated by a 13.56 MHz radio frequency (RF) source. Using I - V characteristics of these probes, electron temperature, electron number density, and ion saturation current was measured as a function of input power and filling gas pressure. An increasing trend was noticed in electron temperature and electron number density for increasing input RF power whilst a decreasing trend was evident in these parameters when measured against filling gas pressure. In addition, the electron energy probability function (EEPF) was also studied by using an asymmetric double probe. These studies confirmed the non-Maxwellian nature of the EEPF and the presence of two groups of the energetic electrons at low filling gas pressures. © 2014 M. Y. Naz et al. 2014 Article NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84896884076&doi=10.1155%2f2014%2f279868&partnerID=40&md5=ea93f458d23a6830df298d102f512d02 Naz, M.Y. and Shukrullah, S. and Ghaffar, A. and Rehman, N.U. (2014) Development of simple designs of multitip probe diagnostic systems for RF plasma characterization. The Scientific World Journal, 2014 . http://eprints.utp.edu.my/31327/
institution Universiti Teknologi Petronas
collection UTP Institutional Repository
description Multitip probes are very useful diagnostics for analyzing and controlling the physical phenomena occurring in low temperature discharge plasmas. However, DC biased probes often fail to perform well in processing plasmas. The objective of the work was to deduce simple designs of DC biased multitip probes for parametric study of radio frequency plasmas. For this purpose, symmetric double probe, asymmetric double probe, and symmetric triple probe diagnostic systems and their driving circuits were designed and tested in an inductively coupled plasma (ICP) generated by a 13.56 MHz radio frequency (RF) source. Using I - V characteristics of these probes, electron temperature, electron number density, and ion saturation current was measured as a function of input power and filling gas pressure. An increasing trend was noticed in electron temperature and electron number density for increasing input RF power whilst a decreasing trend was evident in these parameters when measured against filling gas pressure. In addition, the electron energy probability function (EEPF) was also studied by using an asymmetric double probe. These studies confirmed the non-Maxwellian nature of the EEPF and the presence of two groups of the energetic electrons at low filling gas pressures. © 2014 M. Y. Naz et al.
format Article
author Naz, M.Y.
Shukrullah, S.
Ghaffar, A.
Rehman, N.U.
spellingShingle Naz, M.Y.
Shukrullah, S.
Ghaffar, A.
Rehman, N.U.
Development of simple designs of multitip probe diagnostic systems for RF plasma characterization
author_sort Naz, M.Y.
title Development of simple designs of multitip probe diagnostic systems for RF plasma characterization
title_short Development of simple designs of multitip probe diagnostic systems for RF plasma characterization
title_full Development of simple designs of multitip probe diagnostic systems for RF plasma characterization
title_fullStr Development of simple designs of multitip probe diagnostic systems for RF plasma characterization
title_full_unstemmed Development of simple designs of multitip probe diagnostic systems for RF plasma characterization
title_sort development of simple designs of multitip probe diagnostic systems for rf plasma characterization
publishDate 2014
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-84896884076&doi=10.1155%2f2014%2f279868&partnerID=40&md5=ea93f458d23a6830df298d102f512d02
http://eprints.utp.edu.my/31327/
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score 11.62408

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