Modelling and Simulation of Polysilicon Piezoresistors in CMOS-MEMS Resonator for Biomarker Detection in Exhaled Breath
This research studies longitudinal and transverse polysilicon resistors deposited in the maximum stress points of a CMOS-MEMS resonator for mass detection. The longitudinally mounted resistors were found to increase with the stress and giving maximum of resistance change of 10 to 23 O when the actua...
| Main Authors: | Rabih, A., Dennis, J., Khir, H., Abdalrahman, M., Ahmed, A. |
|---|---|
| Format: | Conference or Workshop Item |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.31654 / |
| Published: |
IEEE Computer Society
2015
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| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84959294526&doi=10.1109%2fISMS.2015.27&partnerID=40&md5=c481c1fa20417a08d23a4274a39441b1 http://eprints.utp.edu.my/31654/ |
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