Modeling and simulation of two modes of vibration in MEMS devices based on embedded piezoresistors
Piezoresistive effect is commonly used as transduction mechanism in microelectromechanical systems (MEMS) and Wheatstone bridge as readout circuit. This paper presents modeling and simulation of two modes of vibration in the MEMS device through embedded piezoresistors which are arranged in Wheatston...
| Main Authors: | Ahmad, F., Dennis, J.O., Khir, M.H.B.M., Bin Hamid, N.H., Yar, A. |
|---|---|
| Format: | Conference or Workshop Item |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.32099 / |
| Published: |
IEEE Computer Society
2014
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| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906351322&doi=10.1109%2fICIAS.2014.6869496&partnerID=40&md5=6b23613466ecde564ce882d7e0e27d84 http://eprints.utp.edu.my/32099/ |
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