Design and characterization of embedded microheater on CMOS-MEMS resonator for application in mass-sensitive gas sensors
In utilizing CMOS-MEMS resonators as mass-sensitive platforms, a uniform temperature distribution on the membrane surface is critical. In this paper, a novel design of CMOS-MEMS resonator with embedded microheater to control the temperature over the sensing layer was successfully designed and charac...
| Main Authors: | Ahmed, A.Y., Dennis, J.O., Md Khir, M.H., Mohamad Saad, M.N. |
|---|---|
| Format: | Conference or Workshop Item |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.32157 / |
| Published: |
IEEE Computer Society
2014
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| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906335946&doi=10.1109%2fICIAS.2014.6869462&partnerID=40&md5=4a80f10089dee877ca72690bc6d5a433 http://eprints.utp.edu.my/32157/ |
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