Testing of nickel-chrome alloy as a tip material for multi-tip langmuir probes

The electrostatic probes are considered to be the most powerful and experimentally simplest technique for plasma characterization. The objective of the work was to test the nickel-chrome alloy as probe tip material for characterization of RF discharge plasmas. In order to meet the objective, a tripl...

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Main Authors: Naz, M.Y., Shukrullah, S., Ghaffar, A., Shakir, I., Ullah, S., Sagir, M.
Format: Article
Institution: Universiti Teknologi Petronas
Record Id / ISBN-0: utp-eprints.32183 /
Published: World Scientific Publishing Co. Pte Ltd 2014
Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84905818835&doi=10.1142%2fS0218625X14500565&partnerID=40&md5=5df55c57769f570601499aebe4ba1144
http://eprints.utp.edu.my/32183/
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spelling utp-eprints.321832022-03-29T05:00:58Z Testing of nickel-chrome alloy as a tip material for multi-tip langmuir probes Naz, M.Y. Shukrullah, S. Ghaffar, A. Shakir, I. Ullah, S. Sagir, M. The electrostatic probes are considered to be the most powerful and experimentally simplest technique for plasma characterization. The objective of the work was to test the nickel-chrome alloy as probe tip material for characterization of RF discharge plasmas. In order to meet the objective, a triple Langmuir probe diagnostic system and associated driving circuit was designed and tested in inductively coupled plasma (ICP) generated by a 13.56 MHz radio frequency (RF) source. Using this probe diagnostic, the electron temperature, electron number density and ion saturation current were measured as a function of input RF power and filling gas pressure. An increasing trend was noticed in electron temperature and electron number density with input power whilst a decreasing trend was evident in these parameters for increasing nitrogen gas pressure. The overall variations in electron temperature and electron number density after repeated measurements were ranging from 5 to 12 and 3 to 13, respectively. © 2014 World Scientific Publishing Company. World Scientific Publishing Co. Pte Ltd 2014 Article NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84905818835&doi=10.1142%2fS0218625X14500565&partnerID=40&md5=5df55c57769f570601499aebe4ba1144 Naz, M.Y. and Shukrullah, S. and Ghaffar, A. and Shakir, I. and Ullah, S. and Sagir, M. (2014) Testing of nickel-chrome alloy as a tip material for multi-tip langmuir probes. Surface Review and Letters, 21 (4). http://eprints.utp.edu.my/32183/
institution Universiti Teknologi Petronas
collection UTP Institutional Repository
description The electrostatic probes are considered to be the most powerful and experimentally simplest technique for plasma characterization. The objective of the work was to test the nickel-chrome alloy as probe tip material for characterization of RF discharge plasmas. In order to meet the objective, a triple Langmuir probe diagnostic system and associated driving circuit was designed and tested in inductively coupled plasma (ICP) generated by a 13.56 MHz radio frequency (RF) source. Using this probe diagnostic, the electron temperature, electron number density and ion saturation current were measured as a function of input RF power and filling gas pressure. An increasing trend was noticed in electron temperature and electron number density with input power whilst a decreasing trend was evident in these parameters for increasing nitrogen gas pressure. The overall variations in electron temperature and electron number density after repeated measurements were ranging from 5 to 12 and 3 to 13, respectively. © 2014 World Scientific Publishing Company.
format Article
author Naz, M.Y.
Shukrullah, S.
Ghaffar, A.
Shakir, I.
Ullah, S.
Sagir, M.
spellingShingle Naz, M.Y.
Shukrullah, S.
Ghaffar, A.
Shakir, I.
Ullah, S.
Sagir, M.
Testing of nickel-chrome alloy as a tip material for multi-tip langmuir probes
author_sort Naz, M.Y.
title Testing of nickel-chrome alloy as a tip material for multi-tip langmuir probes
title_short Testing of nickel-chrome alloy as a tip material for multi-tip langmuir probes
title_full Testing of nickel-chrome alloy as a tip material for multi-tip langmuir probes
title_fullStr Testing of nickel-chrome alloy as a tip material for multi-tip langmuir probes
title_full_unstemmed Testing of nickel-chrome alloy as a tip material for multi-tip langmuir probes
title_sort testing of nickel-chrome alloy as a tip material for multi-tip langmuir probes
publisher World Scientific Publishing Co. Pte Ltd
publishDate 2014
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-84905818835&doi=10.1142%2fS0218625X14500565&partnerID=40&md5=5df55c57769f570601499aebe4ba1144
http://eprints.utp.edu.my/32183/
_version_ 1741197698098266112
score 11.62408

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