Design of CMOS-MEMS based thermoelectric generator
This paper presents the design of micro-scale thermoelectric generator (TEG) using CMOS-MEMS technology. Electrical energy is obtained by means of thermal energy harvesting technique. Thermal energy harvesting has become a promising solution to power up low power system such as wireless sensor netwo...
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| Main Authors: | Rahman, Z.H.A., Khir, M.H.M., Burhanudin, Z.A., Rahman, A.A.A., Jamil, W.A.W. |
|---|---|
| Format: | Conference or Workshop Item |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.32528 / |
| Published: |
2013
|
| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893593745&doi=10.1109%2fRSM.2013.6706460&partnerID=40&md5=2dd1967c536878fb5420c2ddaf12699a http://eprints.utp.edu.my/32528/ |
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