Fabrication of the Trapezoidal electrodes and Electrets material for electrostatic energy harvester
Conversion of the mechanical vibration into electrical energy has been found feasible with MEMS (Micro-Electro-Mechanical-System) electrostatic energy harvesting method. The electrostatic energy harvesting device is fabricated on a silicon wafer for use on miniaturize applications. This paper presen...
| Main Authors: | Ahmad, M.R., Khir, M.H.M., Dennis, J.O. |
|---|---|
| Format: | Conference or Workshop Item |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.32583 / |
| Published: |
2013
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https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893553117&doi=10.1109%2fRSM.2013.6706459&partnerID=40&md5=012573835d07ee3f45b15162f6691def http://eprints.utp.edu.my/32583/ |
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utp-eprints.325832022-03-29T14:06:47Z Fabrication of the Trapezoidal electrodes and Electrets material for electrostatic energy harvester Ahmad, M.R. Khir, M.H.M. Dennis, J.O. Conversion of the mechanical vibration into electrical energy has been found feasible with MEMS (Micro-Electro-Mechanical-System) electrostatic energy harvesting method. The electrostatic energy harvesting device is fabricated on a silicon wafer for use on miniaturize applications. This paper presents the detail fabrication processes of the electrostatic energy harvester components, i.e. the Trapezoidal electrodes and Electrets. The trapezoidal electrodes structure comprises of the seismic mass, serpentine beams and Aluminum electrodes whereas the electrets is made up of Silicon Dioxides (SiO 2). The energy harvester components are designed with Cadence Virtuoso software and later fabricated at the wafer foundry leveraging the 0.35 μm CMOS processes on 200 mm silicon wafers. The trapezoidal electrodes and electrets fabrications went through seven and two masking steps respectively. Performance of the electrets material are evaluated with Corona charging method. Characterization results show that the CVD oxide exhibits good charge retention capability, hence is recommended for application as electrets material on the vibration-based electrostatic energy harvester. © 2013 IEEE. 2013 Conference or Workshop Item NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893553117&doi=10.1109%2fRSM.2013.6706459&partnerID=40&md5=012573835d07ee3f45b15162f6691def Ahmad, M.R. and Khir, M.H.M. and Dennis, J.O. (2013) Fabrication of the Trapezoidal electrodes and Electrets material for electrostatic energy harvester. In: UNSPECIFIED. http://eprints.utp.edu.my/32583/ |
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Universiti Teknologi Petronas |
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UTP Institutional Repository |
| description |
Conversion of the mechanical vibration into electrical energy has been found feasible with MEMS (Micro-Electro-Mechanical-System) electrostatic energy harvesting method. The electrostatic energy harvesting device is fabricated on a silicon wafer for use on miniaturize applications. This paper presents the detail fabrication processes of the electrostatic energy harvester components, i.e. the Trapezoidal electrodes and Electrets. The trapezoidal electrodes structure comprises of the seismic mass, serpentine beams and Aluminum electrodes whereas the electrets is made up of Silicon Dioxides (SiO 2). The energy harvester components are designed with Cadence Virtuoso software and later fabricated at the wafer foundry leveraging the 0.35 μm CMOS processes on 200 mm silicon wafers. The trapezoidal electrodes and electrets fabrications went through seven and two masking steps respectively. Performance of the electrets material are evaluated with Corona charging method. Characterization results show that the CVD oxide exhibits good charge retention capability, hence is recommended for application as electrets material on the vibration-based electrostatic energy harvester. © 2013 IEEE. |
| format |
Conference or Workshop Item |
| author |
Ahmad, M.R. Khir, M.H.M. Dennis, J.O. |
| spellingShingle |
Ahmad, M.R. Khir, M.H.M. Dennis, J.O. Fabrication of the Trapezoidal electrodes and Electrets material for electrostatic energy harvester |
| author_sort |
Ahmad, M.R. |
| title |
Fabrication of the Trapezoidal electrodes and Electrets material for electrostatic energy harvester |
| title_short |
Fabrication of the Trapezoidal electrodes and Electrets material for electrostatic energy harvester |
| title_full |
Fabrication of the Trapezoidal electrodes and Electrets material for electrostatic energy harvester |
| title_fullStr |
Fabrication of the Trapezoidal electrodes and Electrets material for electrostatic energy harvester |
| title_full_unstemmed |
Fabrication of the Trapezoidal electrodes and Electrets material for electrostatic energy harvester |
| title_sort |
fabrication of the trapezoidal electrodes and electrets material for electrostatic energy harvester |
| publishDate |
2013 |
| url |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893553117&doi=10.1109%2fRSM.2013.6706459&partnerID=40&md5=012573835d07ee3f45b15162f6691def http://eprints.utp.edu.my/32583/ |
| _version_ |
1741197753972686848 |
| score |
11.62408 |