Chopper stabilized, low-power, low-noise, front end interface circuit for capacitive CMOS MEMS sensor applications

In this paper, a chopper stabilized fully differential CMOS pre-amplifier circuit is presented. The proposed circuit is designed for sub-atto Farad capacitive CMOS MEMS sensing applications. Chopper stabilization technique is employed to minimize flicker (1/f) noise and offsets in the circuit. The p...

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Main Authors: Sutri, N.Y., Dennis, J.O., Khir, M.H.M., Mian, M.U., Tang, T.B.
Format: Article
Institution: Universiti Teknologi Petronas
Record Id / ISBN-0: utp-eprints.32625 /
Published: 2013
Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84888419224&doi=10.5539%2fmas.v7n12p34&partnerID=40&md5=acd377f1b31c0e0d82a4d2169614e44a
http://eprints.utp.edu.my/32625/
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spelling utp-eprints.326252022-03-29T14:07:48Z Chopper stabilized, low-power, low-noise, front end interface circuit for capacitive CMOS MEMS sensor applications Sutri, N.Y. Dennis, J.O. Khir, M.H.M. Mian, M.U. Tang, T.B. In this paper, a chopper stabilized fully differential CMOS pre-amplifier circuit is presented. The proposed circuit is designed for sub-atto Farad capacitive CMOS MEMS sensing applications. Chopper stabilization technique is employed to minimize flicker (1/f) noise and offsets in the circuit. The proposed circuit is designed using MIMOS 0.35 μm AMS CMOS 3.3 V technology and simulation results from Cadence Virtuoso Spectre circuit simulator show that the proposed circuit is able to detect capacitance changes ranging from 0.0375 aF to 37.5 fF, attain an input inferred noise of 0.9 nV/�vHz, gain of 18.1 dB at 3-dB frequency of 5.5 MHz with total power consumption of 0.33 mW. © by the author(s). 2013 Article NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84888419224&doi=10.5539%2fmas.v7n12p34&partnerID=40&md5=acd377f1b31c0e0d82a4d2169614e44a Sutri, N.Y. and Dennis, J.O. and Khir, M.H.M. and Mian, M.U. and Tang, T.B. (2013) Chopper stabilized, low-power, low-noise, front end interface circuit for capacitive CMOS MEMS sensor applications. Modern Applied Science, 7 (12). pp. 34-42. http://eprints.utp.edu.my/32625/
institution Universiti Teknologi Petronas
collection UTP Institutional Repository
description In this paper, a chopper stabilized fully differential CMOS pre-amplifier circuit is presented. The proposed circuit is designed for sub-atto Farad capacitive CMOS MEMS sensing applications. Chopper stabilization technique is employed to minimize flicker (1/f) noise and offsets in the circuit. The proposed circuit is designed using MIMOS 0.35 μm AMS CMOS 3.3 V technology and simulation results from Cadence Virtuoso Spectre circuit simulator show that the proposed circuit is able to detect capacitance changes ranging from 0.0375 aF to 37.5 fF, attain an input inferred noise of 0.9 nV/�vHz, gain of 18.1 dB at 3-dB frequency of 5.5 MHz with total power consumption of 0.33 mW. © by the author(s).
format Article
author Sutri, N.Y.
Dennis, J.O.
Khir, M.H.M.
Mian, M.U.
Tang, T.B.
spellingShingle Sutri, N.Y.
Dennis, J.O.
Khir, M.H.M.
Mian, M.U.
Tang, T.B.
Chopper stabilized, low-power, low-noise, front end interface circuit for capacitive CMOS MEMS sensor applications
author_sort Sutri, N.Y.
title Chopper stabilized, low-power, low-noise, front end interface circuit for capacitive CMOS MEMS sensor applications
title_short Chopper stabilized, low-power, low-noise, front end interface circuit for capacitive CMOS MEMS sensor applications
title_full Chopper stabilized, low-power, low-noise, front end interface circuit for capacitive CMOS MEMS sensor applications
title_fullStr Chopper stabilized, low-power, low-noise, front end interface circuit for capacitive CMOS MEMS sensor applications
title_full_unstemmed Chopper stabilized, low-power, low-noise, front end interface circuit for capacitive CMOS MEMS sensor applications
title_sort chopper stabilized, low-power, low-noise, front end interface circuit for capacitive cmos mems sensor applications
publishDate 2013
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-84888419224&doi=10.5539%2fmas.v7n12p34&partnerID=40&md5=acd377f1b31c0e0d82a4d2169614e44a
http://eprints.utp.edu.my/32625/
_version_ 1741197760000950272
score 11.62408

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