Characterization of 13.56 MHz RF Ne-N2 mixture plasma using intrusive and non-intrusive diagnostic techniques
RF generated Ne-N2 mixture plasmas are investigated to evaluate the variation in electron temperature (Te) and vibrational temperature (Tν) of the ground state N2 (X,ν ), the second positive system and the first negative system of nitrogen; the electron energy probability function and the populati...
| Main Authors: | Rehman, N.U., Khan, M.A., Naz, M.Y., Shafiq, M., Zakaullah, M. |
|---|---|
| Format: | Article |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.32757 / |
| Published: |
2013
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| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84885133428&doi=10.1088%2f0031-8949%2f88%2f04%2f045503&partnerID=40&md5=9cd4c56e38129082c4efdf2451f93799 http://eprints.utp.edu.my/32757/ |
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