Finite Element Analysis of a Mass-Sensitive CMOS-MEMS Resonator using Conventor Ware Simulation Software /

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Bibliographic Details
Main Authors:	A. Y. Ahmed (Author), Dennis, J. O. (Author), M. H. Md Khir (Author), M. N. Mohamad Saad (Author)
Format:	Article
Language:	English
Subjects:	Electrical engineering Electronic engineering Finite element analysis
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