Environmentally assisted reliability study of externally actuated MEMS devices /

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Bibliographic Details
Main Authors:	M. Tariq Jan (Author), Nor Hisham Hamid (Author), Mohd. Haris Md. Khir (Author), Khalid Ashraf (Author), Muhammad Shoaib (Author)
Format:	Article
Language:	English
Subjects:	Electrical engineering Microelectromechanical systems
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Description
Bibliography:	Bibliography: page 6
ISSN:	2462-215X

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