Environmentally assisted reliability study of externally actuated MEMS devices /

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书目详细资料
Main Authors:	M. Tariq Jan (Author), Nor Hisham Hamid (Author), Mohd. Haris Md. Khir (Author), Khalid Ashraf (Author), Muhammad Shoaib (Author)
格式:	文件
语言:	英语
主题:	Electrical engineering Microelectromechanical systems
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