Study of damping effect on CMOS-MEMS resonator for biomarker detection in exhaled breath

CMOS-MEMS resonators have found a broad usage in mass sensing applications. They can be used to detect biomarkers in exhaled breath (EB) for screening of diseases. Damping is believed to hinder the performance of these resonators. This paper focuses on investigating effects of damping in natural fre...

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Main Authors: Rabih, A.A.S., Dennis, J.O., Khir, M.H.Md., Ahmed, M.G.
Format: Article
Institution: Universiti Teknologi Petronas
Record Id / ISBN-0: utp-eprints.20171 /
Published: Institute of Electrical and Electronics Engineers Inc. 2017
Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012008377&doi=10.1109%2fICIAS.2016.7824037&partnerID=40&md5=740228e475a1a7e0c73ed91fb0aa167d
http://eprints.utp.edu.my/20171/
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spelling utp-eprints.201712018-04-22T14:44:19Z Study of damping effect on CMOS-MEMS resonator for biomarker detection in exhaled breath Rabih, A.A.S. Dennis, J.O. Khir, M.H.Md. Ahmed, M.G. CMOS-MEMS resonators have found a broad usage in mass sensing applications. They can be used to detect biomarkers in exhaled breath (EB) for screening of diseases. Damping is believed to hinder the performance of these resonators. This paper focuses on investigating effects of damping in natural frequency, mass sensitivity and displacement of a proposed resonator for biomarker detection in EB. The resonator is electrostatically actuated using parallel plate capacitor principle. Squeeze film damping was found to affect the resonator performance when the gap distance between the plates was varied as 5, 7, 9, 10 and 11 μm, in which 5 μm led the resonator to be overdamped. For the rest of gaps the resonator is underdamped. FEA simulation using CoventorWare was used to confirm the mathematical modeling of the resonator, in which results agree with the modeling within an acceptable percentage error of 5 . © 2016 IEEE. Institute of Electrical and Electronics Engineers Inc. 2017 Article PeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012008377&doi=10.1109%2fICIAS.2016.7824037&partnerID=40&md5=740228e475a1a7e0c73ed91fb0aa167d Rabih, A.A.S. and Dennis, J.O. and Khir, M.H.Md. and Ahmed, M.G. (2017) Study of damping effect on CMOS-MEMS resonator for biomarker detection in exhaled breath. International Conference on Intelligent and Advanced Systems, ICIAS 2016 . http://eprints.utp.edu.my/20171/
institution Universiti Teknologi Petronas
collection UTP Institutional Repository
description CMOS-MEMS resonators have found a broad usage in mass sensing applications. They can be used to detect biomarkers in exhaled breath (EB) for screening of diseases. Damping is believed to hinder the performance of these resonators. This paper focuses on investigating effects of damping in natural frequency, mass sensitivity and displacement of a proposed resonator for biomarker detection in EB. The resonator is electrostatically actuated using parallel plate capacitor principle. Squeeze film damping was found to affect the resonator performance when the gap distance between the plates was varied as 5, 7, 9, 10 and 11 μm, in which 5 μm led the resonator to be overdamped. For the rest of gaps the resonator is underdamped. FEA simulation using CoventorWare was used to confirm the mathematical modeling of the resonator, in which results agree with the modeling within an acceptable percentage error of 5 . © 2016 IEEE.
format Article
author Rabih, A.A.S.
Dennis, J.O.
Khir, M.H.Md.
Ahmed, M.G.
spellingShingle Rabih, A.A.S.
Dennis, J.O.
Khir, M.H.Md.
Ahmed, M.G.
Study of damping effect on CMOS-MEMS resonator for biomarker detection in exhaled breath
author_sort Rabih, A.A.S.
title Study of damping effect on CMOS-MEMS resonator for biomarker detection in exhaled breath
title_short Study of damping effect on CMOS-MEMS resonator for biomarker detection in exhaled breath
title_full Study of damping effect on CMOS-MEMS resonator for biomarker detection in exhaled breath
title_fullStr Study of damping effect on CMOS-MEMS resonator for biomarker detection in exhaled breath
title_full_unstemmed Study of damping effect on CMOS-MEMS resonator for biomarker detection in exhaled breath
title_sort study of damping effect on cmos-mems resonator for biomarker detection in exhaled breath
publisher Institute of Electrical and Electronics Engineers Inc.
publishDate 2017
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012008377&doi=10.1109%2fICIAS.2016.7824037&partnerID=40&md5=740228e475a1a7e0c73ed91fb0aa167d
http://eprints.utp.edu.my/20171/
_version_ 1741196329303932928
score 11.62408

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