Study of damping effect on CMOS-MEMS resonator for biomarker detection in exhaled breath
CMOS-MEMS resonators have found a broad usage in mass sensing applications. They can be used to detect biomarkers in exhaled breath (EB) for screening of diseases. Damping is believed to hinder the performance of these resonators. This paper focuses on investigating effects of damping in natural fre...
| Main Authors: | Rabih, A.A.S., Dennis, J.O., Khir, M.H.Md., Ahmed, M.G. |
|---|---|
| Format: | Article |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.20171 / |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2017
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| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012008377&doi=10.1109%2fICIAS.2016.7824037&partnerID=40&md5=740228e475a1a7e0c73ed91fb0aa167d http://eprints.utp.edu.my/20171/ |
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