CMOS-MEMS resonator parametric variation analysis through equivalent circuit modeling

In this paper, we report a micro electro mechanical system (MEMS) shuttle resonator fabricated on CMOS-MEMS wafer technique. The resonator operates at the resonant frequency when a current flows through the metal layers in the presence of an external magnetic field. We investigate the resonant frequ...

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Main Authors: Mian, M.U., Dennis, J.O., Khir, M.H.M., Sutri, N.Y., Ahmed, A.Y., Tang, T.B.
Format: Article
Institution: Universiti Teknologi Petronas
Record Id / ISBN-0: utp-eprints.20230 /
Published: Institute of Electrical and Electronics Engineers Inc. 2017
Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012034462&doi=10.1109%2fICIAS.2016.7824056&partnerID=40&md5=d071ae742f56f6167b13e3da635eb571
http://eprints.utp.edu.my/20230/
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spelling utp-eprints.202302018-04-22T14:46:31Z CMOS-MEMS resonator parametric variation analysis through equivalent circuit modeling Mian, M.U. Dennis, J.O. Khir, M.H.M. Sutri, N.Y. Ahmed, A.Y. Tang, T.B. In this paper, we report a micro electro mechanical system (MEMS) shuttle resonator fabricated on CMOS-MEMS wafer technique. The resonator operates at the resonant frequency when a current flows through the metal layers in the presence of an external magnetic field. We investigate the resonant frequency and amplitude shifts due to parametric variation in beam length, width, and structure thickness in resonator motion. The theoretical formulation of the equivalent circuit model is presented. Simulation of resonator with variations are carried out using equivalent circuit model, these variations are based on fabrication foundry tolerance range. Simulation results show a range of operational frequencies in which the resonator can perform under the fabrication tolerances provided by the foundry. © 2016 IEEE. Institute of Electrical and Electronics Engineers Inc. 2017 Article PeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012034462&doi=10.1109%2fICIAS.2016.7824056&partnerID=40&md5=d071ae742f56f6167b13e3da635eb571 Mian, M.U. and Dennis, J.O. and Khir, M.H.M. and Sutri, N.Y. and Ahmed, A.Y. and Tang, T.B. (2017) CMOS-MEMS resonator parametric variation analysis through equivalent circuit modeling. International Conference on Intelligent and Advanced Systems, ICIAS 2016 . http://eprints.utp.edu.my/20230/
institution Universiti Teknologi Petronas
collection UTP Institutional Repository
description In this paper, we report a micro electro mechanical system (MEMS) shuttle resonator fabricated on CMOS-MEMS wafer technique. The resonator operates at the resonant frequency when a current flows through the metal layers in the presence of an external magnetic field. We investigate the resonant frequency and amplitude shifts due to parametric variation in beam length, width, and structure thickness in resonator motion. The theoretical formulation of the equivalent circuit model is presented. Simulation of resonator with variations are carried out using equivalent circuit model, these variations are based on fabrication foundry tolerance range. Simulation results show a range of operational frequencies in which the resonator can perform under the fabrication tolerances provided by the foundry. © 2016 IEEE.
format Article
author Mian, M.U.
Dennis, J.O.
Khir, M.H.M.
Sutri, N.Y.
Ahmed, A.Y.
Tang, T.B.
spellingShingle Mian, M.U.
Dennis, J.O.
Khir, M.H.M.
Sutri, N.Y.
Ahmed, A.Y.
Tang, T.B.
CMOS-MEMS resonator parametric variation analysis through equivalent circuit modeling
author_sort Mian, M.U.
title CMOS-MEMS resonator parametric variation analysis through equivalent circuit modeling
title_short CMOS-MEMS resonator parametric variation analysis through equivalent circuit modeling
title_full CMOS-MEMS resonator parametric variation analysis through equivalent circuit modeling
title_fullStr CMOS-MEMS resonator parametric variation analysis through equivalent circuit modeling
title_full_unstemmed CMOS-MEMS resonator parametric variation analysis through equivalent circuit modeling
title_sort cmos-mems resonator parametric variation analysis through equivalent circuit modeling
publisher Institute of Electrical and Electronics Engineers Inc.
publishDate 2017
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012034462&doi=10.1109%2fICIAS.2016.7824056&partnerID=40&md5=d071ae742f56f6167b13e3da635eb571
http://eprints.utp.edu.my/20230/
_version_ 1741196338602704896
score 11.62408

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