CMOS-MEMS resonator parametric variation analysis through equivalent circuit modeling
In this paper, we report a micro electro mechanical system (MEMS) shuttle resonator fabricated on CMOS-MEMS wafer technique. The resonator operates at the resonant frequency when a current flows through the metal layers in the presence of an external magnetic field. We investigate the resonant frequ...
| Main Authors: | Mian, M.U., Dennis, J.O., Khir, M.H.M., Sutri, N.Y., Ahmed, A.Y., Tang, T.B. |
|---|---|
| Format: | Article |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.20230 / |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2017
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| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012034462&doi=10.1109%2fICIAS.2016.7824056&partnerID=40&md5=d071ae742f56f6167b13e3da635eb571 http://eprints.utp.edu.my/20230/ |
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