FEM analysis of sezawa mode SAW sensor for VOC based on CMOS compatible AlN/SiO2/Si multilayer structure
A Finite Element Method (FEM) simulation study is conducted, aiming to scrutinize the sensitivity of Sezawa wave mode in a multilayer AlN/SiO2 /Si Surface Acoustic Wave (SAW) sensor to low concentrations of Volatile Organic Compounds (VOCs), that is, trichloromethane, trichloroethylene, carbon tetra...
| Main Authors: | Aslam, M.Z., Jeoti, V., Karuppanan, S., Malik, A.F., Iqbal, A. |
|---|---|
| Format: | Article |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.21520 / |
| Published: |
MDPI AG
2018
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| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85047608741&doi=10.3390%2fs18061687&partnerID=40&md5=9027fd29a23bf9b19034e20369fa2fe2 http://eprints.utp.edu.my/21520/ |
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