Characterization of embedded micro-heater and temperature sensor in a CMOS-MEMS resonator for gas sensing
| Main Authors: | Ahmed, M.G.A., Dennis, J.O., Khair, M.H.M., Rabih, A.A.S., Mian, M.U. |
|---|---|
| Format: | Article |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.24297 / |
| Published: |
Research India Publications
2016
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| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84963670575&partnerID=40&md5=ef3a4ae88ae1886424d44a22e7b3eacf http://eprints.utp.edu.my/24297/ |
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utp-eprints.242972021-08-23T14:02:40Z Characterization of embedded micro-heater and temperature sensor in a CMOS-MEMS resonator for gas sensing Ahmed, M.G.A. Dennis, J.O. Khair, M.H.M. Rabih, A.A.S. Mian, M.U. Research India Publications 2016 Article NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84963670575&partnerID=40&md5=ef3a4ae88ae1886424d44a22e7b3eacf Ahmed, M.G.A. and Dennis, J.O. and Khair, M.H.M. and Rabih, A.A.S. and Mian, M.U. (2016) Characterization of embedded micro-heater and temperature sensor in a CMOS-MEMS resonator for gas sensing. International Journal of Applied Engineering Research, 11 (6). pp. 4381-4386. http://eprints.utp.edu.my/24297/ |
| institution |
Universiti Teknologi Petronas |
| collection |
UTP Institutional Repository |
| format |
Article |
| author |
Ahmed, M.G.A. Dennis, J.O. Khair, M.H.M. Rabih, A.A.S. Mian, M.U. |
| spellingShingle |
Ahmed, M.G.A. Dennis, J.O. Khair, M.H.M. Rabih, A.A.S. Mian, M.U. Characterization of embedded micro-heater and temperature sensor in a CMOS-MEMS resonator for gas sensing |
| author_sort |
Ahmed, M.G.A. |
| title |
Characterization of embedded micro-heater and temperature sensor in a CMOS-MEMS resonator for gas sensing |
| title_short |
Characterization of embedded micro-heater and temperature sensor in a CMOS-MEMS resonator for gas sensing |
| title_full |
Characterization of embedded micro-heater and temperature sensor in a CMOS-MEMS resonator for gas sensing |
| title_fullStr |
Characterization of embedded micro-heater and temperature sensor in a CMOS-MEMS resonator for gas sensing |
| title_full_unstemmed |
Characterization of embedded micro-heater and temperature sensor in a CMOS-MEMS resonator for gas sensing |
| title_sort |
characterization of embedded micro-heater and temperature sensor in a cmos-mems resonator for gas sensing |
| publisher |
Research India Publications |
| publishDate |
2016 |
| url |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84963670575&partnerID=40&md5=ef3a4ae88ae1886424d44a22e7b3eacf http://eprints.utp.edu.my/24297/ |
| _version_ |
1741196814304935936 |
| score |
11.62408 |