Characterization of embedded micro-heater and temperature sensor in a CMOS-MEMS resonator for gas sensing
| Main Authors: | Ahmed, M.G.A., Dennis, J.O., Khair, M.H.M., Rabih, A.A.S., Mian, M.U. |
|---|---|
| Format: | Article |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.24297 / |
| Published: |
Research India Publications
2016
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| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84963670575&partnerID=40&md5=ef3a4ae88ae1886424d44a22e7b3eacf http://eprints.utp.edu.my/24297/ |
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