Design and modeling of a CMOS MEMS gravimetric sensor
Design and modeling of a CMOS MEMS device using 0.35 ìm CMOS technology is used to achieve high sensitivity on mass sensing is presented in this paper. The purpose of this paper is to investigate the effect of increasing beams lengths which support the membrane of the device, on the resonance frequ...
| Main Authors: | Abdalrahman, M.G., Dennis, J.O., Khir, M.H.M. |
|---|---|
| Format: | Article |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.28551 / |
| Published: |
2014
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https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891063934&doi=10.4028%2fwww.scientific.net%2fAMM.446-447.1073&partnerID=40&md5=3cf6e9748c9da66284f823e759a7e83f http://eprints.utp.edu.my/28551/ |
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utp-eprints.285512021-09-07T08:32:34Z Design and modeling of a CMOS MEMS gravimetric sensor Abdalrahman, M.G. Dennis, J.O. Khir, M.H.M. Design and modeling of a CMOS MEMS device using 0.35 ìm CMOS technology is used to achieve high sensitivity on mass sensing is presented in this paper. The purpose of this paper is to investigate the effect of increasing beams lengths which support the membrane of the device, on the resonance frequency to achieve high sensitivity. A study on the effect of added mass on the device on natural frequency is also conducted. Mass sensitivity of this device is found to be 153 mHz/ng. At damping ratio of 0.0002, the resonant frequency of the resonator is 19.04 kHz with quality factor 3500. © (2014) Trans Tech Publications, Switzerland. 2014 Article NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891063934&doi=10.4028%2fwww.scientific.net%2fAMM.446-447.1073&partnerID=40&md5=3cf6e9748c9da66284f823e759a7e83f Abdalrahman, M.G. and Dennis, J.O. and Khir, M.H.M. (2014) Design and modeling of a CMOS MEMS gravimetric sensor. Applied Mechanics and Materials, 446-44 . pp. 1073-1077. http://eprints.utp.edu.my/28551/ |
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Universiti Teknologi Petronas |
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| description |
Design and modeling of a CMOS MEMS device using 0.35 ìm CMOS technology is used to achieve high sensitivity on mass sensing is presented in this paper. The purpose of this paper is to investigate the effect of increasing beams lengths which support the membrane of the device, on the resonance frequency to achieve high sensitivity. A study on the effect of added mass on the device on natural frequency is also conducted. Mass sensitivity of this device is found to be 153 mHz/ng. At damping ratio of 0.0002, the resonant frequency of the resonator is 19.04 kHz with quality factor 3500. © (2014) Trans Tech Publications, Switzerland. |
| format |
Article |
| author |
Abdalrahman, M.G. Dennis, J.O. Khir, M.H.M. |
| spellingShingle |
Abdalrahman, M.G. Dennis, J.O. Khir, M.H.M. Design and modeling of a CMOS MEMS gravimetric sensor |
| author_sort |
Abdalrahman, M.G. |
| title |
Design and modeling of a CMOS MEMS gravimetric sensor |
| title_short |
Design and modeling of a CMOS MEMS gravimetric sensor |
| title_full |
Design and modeling of a CMOS MEMS gravimetric sensor |
| title_fullStr |
Design and modeling of a CMOS MEMS gravimetric sensor |
| title_full_unstemmed |
Design and modeling of a CMOS MEMS gravimetric sensor |
| title_sort |
design and modeling of a cmos mems gravimetric sensor |
| publishDate |
2014 |
| url |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891063934&doi=10.4028%2fwww.scientific.net%2fAMM.446-447.1073&partnerID=40&md5=3cf6e9748c9da66284f823e759a7e83f http://eprints.utp.edu.my/28551/ |
| _version_ |
1741197122120712192 |
| score |
11.62408 |