Design and modeling of a CMOS MEMS gravimetric sensor
Design and modeling of a CMOS MEMS device using 0.35 ìm CMOS technology is used to achieve high sensitivity on mass sensing is presented in this paper. The purpose of this paper is to investigate the effect of increasing beams lengths which support the membrane of the device, on the resonance frequ...
| Main Authors: | Abdalrahman, M.G., Dennis, J.O., Khir, M.H.M. |
|---|---|
| Format: | Article |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.28551 / |
| Published: |
2014
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| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891063934&doi=10.4028%2fwww.scientific.net%2fAMM.446-447.1073&partnerID=40&md5=3cf6e9748c9da66284f823e759a7e83f http://eprints.utp.edu.my/28551/ |
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