Reliability and fatigue analysis in cantilever-based MEMS devices operating in harsh environments

The microelectromechanical system (MEMS) is one of the most diversified fields of microelectronics; it is rated to be the most promising technology of modern engineering. MEMS can sense, actuate, and integrate mechanical and electromechanical components of micro- and nano sizes on a single silicon s...

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Main Authors: Tariq Jan, M., Hisham Bin Hamid, N., Md Khir, M.H., Ashraf, K., Shoaib, M.
Format: Article
Institution: Universiti Teknologi Petronas
Record Id / ISBN-0: utp-eprints.31362 /
Published: 2014
Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893651288&doi=10.1155%2f2014%2f987847&partnerID=40&md5=b14ade815353443a2082d5388ab7dd5f
http://eprints.utp.edu.my/31362/
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spelling utp-eprints.313622022-03-25T09:07:25Z Reliability and fatigue analysis in cantilever-based MEMS devices operating in harsh environments Tariq Jan, M. Hisham Bin Hamid, N. Md Khir, M.H. Ashraf, K. Shoaib, M. The microelectromechanical system (MEMS) is one of the most diversified fields of microelectronics; it is rated to be the most promising technology of modern engineering. MEMS can sense, actuate, and integrate mechanical and electromechanical components of micro- and nano sizes on a single silicon substrate using microfabrication techniques. MEMS industry is at the verge of transforming the semiconductor world into MEMS universe, apart from other hindrances; the reliability of these devices is the focal point of recent research. Commercialization is highly dependent on the reliability of these devices. MEMS requires a high level of reliability. Several technological factors, operating conditions, and environmental effects influencing the performances of MEMS devices must be completely understood. This study reviews some of the major reliability issues and failure mechanisms. Specifically, the fatigue in MEMS is a major material reliability issue resulting in structural damage, crack growth, and lifetime measurements of MEMS devices in the light of statistical distribution and fatigue implementation of Paris' law for fatigue crack accumulation under the influence of undesirable operating and environmental conditions. © 2014 Mohammad Tariq Jan et al. 2014 Article NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893651288&doi=10.1155%2f2014%2f987847&partnerID=40&md5=b14ade815353443a2082d5388ab7dd5f Tariq Jan, M. and Hisham Bin Hamid, N. and Md Khir, M.H. and Ashraf, K. and Shoaib, M. (2014) Reliability and fatigue analysis in cantilever-based MEMS devices operating in harsh environments. Journal of Quality and Reliability Engineering, 2014 . http://eprints.utp.edu.my/31362/
institution Universiti Teknologi Petronas
collection UTP Institutional Repository
description The microelectromechanical system (MEMS) is one of the most diversified fields of microelectronics; it is rated to be the most promising technology of modern engineering. MEMS can sense, actuate, and integrate mechanical and electromechanical components of micro- and nano sizes on a single silicon substrate using microfabrication techniques. MEMS industry is at the verge of transforming the semiconductor world into MEMS universe, apart from other hindrances; the reliability of these devices is the focal point of recent research. Commercialization is highly dependent on the reliability of these devices. MEMS requires a high level of reliability. Several technological factors, operating conditions, and environmental effects influencing the performances of MEMS devices must be completely understood. This study reviews some of the major reliability issues and failure mechanisms. Specifically, the fatigue in MEMS is a major material reliability issue resulting in structural damage, crack growth, and lifetime measurements of MEMS devices in the light of statistical distribution and fatigue implementation of Paris' law for fatigue crack accumulation under the influence of undesirable operating and environmental conditions. © 2014 Mohammad Tariq Jan et al.
format Article
author Tariq Jan, M.
Hisham Bin Hamid, N.
Md Khir, M.H.
Ashraf, K.
Shoaib, M.
spellingShingle Tariq Jan, M.
Hisham Bin Hamid, N.
Md Khir, M.H.
Ashraf, K.
Shoaib, M.
Reliability and fatigue analysis in cantilever-based MEMS devices operating in harsh environments
author_sort Tariq Jan, M.
title Reliability and fatigue analysis in cantilever-based MEMS devices operating in harsh environments
title_short Reliability and fatigue analysis in cantilever-based MEMS devices operating in harsh environments
title_full Reliability and fatigue analysis in cantilever-based MEMS devices operating in harsh environments
title_fullStr Reliability and fatigue analysis in cantilever-based MEMS devices operating in harsh environments
title_full_unstemmed Reliability and fatigue analysis in cantilever-based MEMS devices operating in harsh environments
title_sort reliability and fatigue analysis in cantilever-based mems devices operating in harsh environments
publishDate 2014
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893651288&doi=10.1155%2f2014%2f987847&partnerID=40&md5=b14ade815353443a2082d5388ab7dd5f
http://eprints.utp.edu.my/31362/
_version_ 1741197560805064704
score 11.62408

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