Reliability and fatigue analysis in cantilever-based MEMS devices operating in harsh environments
The microelectromechanical system (MEMS) is one of the most diversified fields of microelectronics; it is rated to be the most promising technology of modern engineering. MEMS can sense, actuate, and integrate mechanical and electromechanical components of micro- and nano sizes on a single silicon s...
| Main Authors: | Tariq Jan, M., Hisham Bin Hamid, N., Md Khir, M.H., Ashraf, K., Shoaib, M. |
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| Format: | Article |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.31362 / |
| Published: |
2014
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| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893651288&doi=10.1155%2f2014%2f987847&partnerID=40&md5=b14ade815353443a2082d5388ab7dd5f http://eprints.utp.edu.my/31362/ |
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