MEMS 3-DoF gyroscope design, modeling and simulation through equivalent circuit lumped parameter model

Pre-fabrication, behavioural and performance analysis with computer aided design (CAD) tools is a common and fabrication cost effective practice. In light of this we present a simulation methodology for a dual-mass oscillator based 3 Degree of Freedom (3-DoF) MEMS gyroscope. 3-DoF Gyroscope is model...

Full description

Main Authors: Mian, M.U., Dennis, J.O., Md. Khir, M.H., Riaz, K., Iqbal, A., Bazaz, S.A., Tang, T.B.
Format: Conference or Workshop Item
Institution: Universiti Teknologi Petronas
Record Id / ISBN-0: utp-eprints.31472 /
Published: American Institute of Physics Inc. 2015
Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012018355&doi=10.1063%2f1.4919163&partnerID=40&md5=ea12ea0013237f77d3500f1489e3dde6
http://eprints.utp.edu.my/31472/
Tags: Add Tag
No Tags, Be the first to tag this record!
id utp-eprints.31472
recordtype eprints
spelling utp-eprints.314722022-03-26T03:20:14Z MEMS 3-DoF gyroscope design, modeling and simulation through equivalent circuit lumped parameter model Mian, M.U. Dennis, J.O. Md. Khir, M.H. Riaz, K. Iqbal, A. Bazaz, S.A. Tang, T.B. Pre-fabrication, behavioural and performance analysis with computer aided design (CAD) tools is a common and fabrication cost effective practice. In light of this we present a simulation methodology for a dual-mass oscillator based 3 Degree of Freedom (3-DoF) MEMS gyroscope. 3-DoF Gyroscope is modeled through lumped parameter models using equivalent circuit elements. These equivalent circuits consist of elementary components which are counterpart of their respective mechanical components, used to design and fabricate 3-DoF MEMS gyroscope. Complete designing of equivalent circuit model, mathematical modeling and simulation are being presented in this paper. Behaviors of the equivalent lumped models derived for the proposed device design are simulated in MEMSPRO T-SPICE software. Simulations are carried out with the design specifications following design rules of the MetalMUMPS fabrication process. Drive mass resonant frequencies simulated by this technique are 1.59 kHz and 2.05 kHz respectively, which are close to the resonant frequencies found by the analytical formulation of the gyroscope. The lumped equivalent circuit modeling technique proved to be a time efficient modeling technique for the analysis of complex MEMS devices like 3-DoF gyroscopes. The technique proves to be an alternative approach to the complex and time consuming couple field analysis Finite Element Analysis (FEA) previously used. © 2015 AIP Publishing LLC. American Institute of Physics Inc. 2015 Conference or Workshop Item NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012018355&doi=10.1063%2f1.4919163&partnerID=40&md5=ea12ea0013237f77d3500f1489e3dde6 Mian, M.U. and Dennis, J.O. and Md. Khir, M.H. and Riaz, K. and Iqbal, A. and Bazaz, S.A. and Tang, T.B. (2015) MEMS 3-DoF gyroscope design, modeling and simulation through equivalent circuit lumped parameter model. In: UNSPECIFIED. http://eprints.utp.edu.my/31472/
institution Universiti Teknologi Petronas
collection UTP Institutional Repository
description Pre-fabrication, behavioural and performance analysis with computer aided design (CAD) tools is a common and fabrication cost effective practice. In light of this we present a simulation methodology for a dual-mass oscillator based 3 Degree of Freedom (3-DoF) MEMS gyroscope. 3-DoF Gyroscope is modeled through lumped parameter models using equivalent circuit elements. These equivalent circuits consist of elementary components which are counterpart of their respective mechanical components, used to design and fabricate 3-DoF MEMS gyroscope. Complete designing of equivalent circuit model, mathematical modeling and simulation are being presented in this paper. Behaviors of the equivalent lumped models derived for the proposed device design are simulated in MEMSPRO T-SPICE software. Simulations are carried out with the design specifications following design rules of the MetalMUMPS fabrication process. Drive mass resonant frequencies simulated by this technique are 1.59 kHz and 2.05 kHz respectively, which are close to the resonant frequencies found by the analytical formulation of the gyroscope. The lumped equivalent circuit modeling technique proved to be a time efficient modeling technique for the analysis of complex MEMS devices like 3-DoF gyroscopes. The technique proves to be an alternative approach to the complex and time consuming couple field analysis Finite Element Analysis (FEA) previously used. © 2015 AIP Publishing LLC.
format Conference or Workshop Item
author Mian, M.U.
Dennis, J.O.
Md. Khir, M.H.
Riaz, K.
Iqbal, A.
Bazaz, S.A.
Tang, T.B.
spellingShingle Mian, M.U.
Dennis, J.O.
Md. Khir, M.H.
Riaz, K.
Iqbal, A.
Bazaz, S.A.
Tang, T.B.
MEMS 3-DoF gyroscope design, modeling and simulation through equivalent circuit lumped parameter model
author_sort Mian, M.U.
title MEMS 3-DoF gyroscope design, modeling and simulation through equivalent circuit lumped parameter model
title_short MEMS 3-DoF gyroscope design, modeling and simulation through equivalent circuit lumped parameter model
title_full MEMS 3-DoF gyroscope design, modeling and simulation through equivalent circuit lumped parameter model
title_fullStr MEMS 3-DoF gyroscope design, modeling and simulation through equivalent circuit lumped parameter model
title_full_unstemmed MEMS 3-DoF gyroscope design, modeling and simulation through equivalent circuit lumped parameter model
title_sort mems 3-dof gyroscope design, modeling and simulation through equivalent circuit lumped parameter model
publisher American Institute of Physics Inc.
publishDate 2015
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012018355&doi=10.1063%2f1.4919163&partnerID=40&md5=ea12ea0013237f77d3500f1489e3dde6
http://eprints.utp.edu.my/31472/
_version_ 1741197580428115968
score 11.62408

Similar Items