MEMS 3-DoF gyroscope design, modeling and simulation through equivalent circuit lumped parameter model
Pre-fabrication, behavioural and performance analysis with computer aided design (CAD) tools is a common and fabrication cost effective practice. In light of this we present a simulation methodology for a dual-mass oscillator based 3 Degree of Freedom (3-DoF) MEMS gyroscope. 3-DoF Gyroscope is model...
| Main Authors: | Mian, M.U., Dennis, J.O., Md. Khir, M.H., Riaz, K., Iqbal, A., Bazaz, S.A., Tang, T.B. |
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| Format: | Conference or Workshop Item |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.31472 / |
| Published: |
American Institute of Physics Inc.
2015
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| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012018355&doi=10.1063%2f1.4919163&partnerID=40&md5=ea12ea0013237f77d3500f1489e3dde6 http://eprints.utp.edu.my/31472/ |
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