Design, modeling and simulation of CMOS-MEMS resonator for biomedical application

CMOS-MEMS resonators have found a broad usage in mass sensing applications especially in biomedical field. This paper reports theoretical calculations and Finite Element Method (FEM) simulation for a proposed microresonator for detection of acetone in exhaled breath as biomarker for diabetes. The re...

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Main Authors: Rabih, A.A.S., Dennis, J.O., Md Khir, M.H., Abdullah, M.A.
Format: Conference or Workshop Item
Institution: Universiti Teknologi Petronas
Record Id / ISBN-0: utp-eprints.32122 /
Published: IEEE Computer Society 2014
Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906346379&doi=10.1109%2fICIAS.2014.6869455&partnerID=40&md5=6d57cdd807734a8a7e78f70ca82aaf69
http://eprints.utp.edu.my/32122/
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spelling utp-eprints.321222022-03-29T04:59:21Z Design, modeling and simulation of CMOS-MEMS resonator for biomedical application Rabih, A.A.S. Dennis, J.O. Md Khir, M.H. Abdullah, M.A. CMOS-MEMS resonators have found a broad usage in mass sensing applications especially in biomedical field. This paper reports theoretical calculations and Finite Element Method (FEM) simulation for a proposed microresonator for detection of acetone in exhaled breath as biomarker for diabetes. The resonator is 760 μm long and 340 μm wide with 1.461ng effective mass, 21.331 kHz natural resonance frequency, and 8.867 mHz/pg mass sensitivity. Deposition of 4 μm sensitive layer gives 781 μHz/ppm gas concentration sensitivity with minimum concentration detection of 1.28 ppm. The operating voltage of this resonator is below 50 V and the static sensing capacitance is 90.84 fF. Due to the reasonable mass sensitivity of the resonator, it could be used for mass sensing applications. © 2014 IEEE. IEEE Computer Society 2014 Conference or Workshop Item NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906346379&doi=10.1109%2fICIAS.2014.6869455&partnerID=40&md5=6d57cdd807734a8a7e78f70ca82aaf69 Rabih, A.A.S. and Dennis, J.O. and Md Khir, M.H. and Abdullah, M.A. (2014) Design, modeling and simulation of CMOS-MEMS resonator for biomedical application. In: UNSPECIFIED. http://eprints.utp.edu.my/32122/
institution Universiti Teknologi Petronas
collection UTP Institutional Repository
description CMOS-MEMS resonators have found a broad usage in mass sensing applications especially in biomedical field. This paper reports theoretical calculations and Finite Element Method (FEM) simulation for a proposed microresonator for detection of acetone in exhaled breath as biomarker for diabetes. The resonator is 760 μm long and 340 μm wide with 1.461ng effective mass, 21.331 kHz natural resonance frequency, and 8.867 mHz/pg mass sensitivity. Deposition of 4 μm sensitive layer gives 781 μHz/ppm gas concentration sensitivity with minimum concentration detection of 1.28 ppm. The operating voltage of this resonator is below 50 V and the static sensing capacitance is 90.84 fF. Due to the reasonable mass sensitivity of the resonator, it could be used for mass sensing applications. © 2014 IEEE.
format Conference or Workshop Item
author Rabih, A.A.S.
Dennis, J.O.
Md Khir, M.H.
Abdullah, M.A.
spellingShingle Rabih, A.A.S.
Dennis, J.O.
Md Khir, M.H.
Abdullah, M.A.
Design, modeling and simulation of CMOS-MEMS resonator for biomedical application
author_sort Rabih, A.A.S.
title Design, modeling and simulation of CMOS-MEMS resonator for biomedical application
title_short Design, modeling and simulation of CMOS-MEMS resonator for biomedical application
title_full Design, modeling and simulation of CMOS-MEMS resonator for biomedical application
title_fullStr Design, modeling and simulation of CMOS-MEMS resonator for biomedical application
title_full_unstemmed Design, modeling and simulation of CMOS-MEMS resonator for biomedical application
title_sort design, modeling and simulation of cmos-mems resonator for biomedical application
publisher IEEE Computer Society
publishDate 2014
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906346379&doi=10.1109%2fICIAS.2014.6869455&partnerID=40&md5=6d57cdd807734a8a7e78f70ca82aaf69
http://eprints.utp.edu.my/32122/
_version_ 1741197689564954624
score 11.62408

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