Design, modeling and simulation of CMOS-MEMS resonator for biomedical application
CMOS-MEMS resonators have found a broad usage in mass sensing applications especially in biomedical field. This paper reports theoretical calculations and Finite Element Method (FEM) simulation for a proposed microresonator for detection of acetone in exhaled breath as biomarker for diabetes. The re...
| Main Authors: | Rabih, A.A.S., Dennis, J.O., Md Khir, M.H., Abdullah, M.A. |
|---|---|
| Format: | Conference or Workshop Item |
| Institution: | Universiti Teknologi Petronas |
| Record Id / ISBN-0: | utp-eprints.32122 / |
| Published: |
IEEE Computer Society
2014
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| Online Access: |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906346379&doi=10.1109%2fICIAS.2014.6869455&partnerID=40&md5=6d57cdd807734a8a7e78f70ca82aaf69 http://eprints.utp.edu.my/32122/ |
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