Fabrication of perfect silicon corrugated diaphragm using KOH etching for MEMS pressure sensor /
Saved in:
| 主要作者: | |
|---|---|
| 其他作者: | |
| 格式: | 文件 |
| 语言: | 英语 |
| 主题: | |
| 标签: |
没有标签, 成为第一个标记此记录!
|
MARC
| LEADER | 00000naa a2200000 a 4500 | ||
|---|---|---|---|
| 001 | vtls000530549 | ||
| 003 | PNM | ||
| 005 | 20080505145500.0 | ||
| 008 | 080425s2005 my e o100 0 eng | ||
| 015 | |a M071-00877 | ||
| 015 | |a IPM2005 | ||
| 039 | 9 | |a 200805051455 |b rosenah |y 200804251140 |z muhammad | |
| 049 | 0 | 0 | |a ipm |
| 090 | 0 | 0 | |a 621.3822 |b INT |c f |d M |
| 100 | 0 | |a Norhayati Soin | |
| 245 | 1 | 0 | |a Fabrication of perfect silicon corrugated diaphragm using KOH etching for MEMS pressure sensor / |c Norhayati Soin and Burhanuddin Yeop Majlis |
| 650 | 0 | |a Pressure transducers | |
| 700 | 0 | |a Burhanuddin Yeop Majlis | |
| 773 | 0 | |t INTERNATIONAL COLLOQUIUM ON SIGNAL PROCESSING AND ITS APPLICATIONS (CSPA) |g (1st : 2005 : Pangkor, Perak):4p. | |
| 999 | |a VIRTUA40 | ||
| 999 | |a VTLSSORT0080*0150*0151*0490*0900*1000*2450*6500*7000*7730*9991 | ||