Fabrication of perfect silicon corrugated diaphragm using KOH etching for MEMS pressure sensor /

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Bibliographic Details
Main Author:	Norhayati Soin
Other Authors:	Burhanuddin Yeop Majlis
Format:	Article
Language:	English
Subjects:	Pressure transducers
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MARC


LEADER	00000naa a2200000 a 4500
001	vtls000530549
003	PNM
005	20080505145500.0
008	080425s2005 my e o100 0 eng
015			\|a M071-00877
015			\|a IPM2005
039		9	\|a 200805051455 \|b rosenah \|y 200804251140 \|z muhammad
049	0	0	\|a ipm
090	0	0	\|a 621.3822 \|b INT \|c f \|d M
100	0		\|a Norhayati Soin
245	1	0	\|a Fabrication of perfect silicon corrugated diaphragm using KOH etching for MEMS pressure sensor / \|c Norhayati Soin and Burhanuddin Yeop Majlis
650		0	\|a Pressure transducers
700	0		\|a Burhanuddin Yeop Majlis
773	0		\|t INTERNATIONAL COLLOQUIUM ON SIGNAL PROCESSING AND ITS APPLICATIONS (CSPA) \|g (1st : 2005 : Pangkor, Perak):4p.
999			\|a VIRTUA40
999			\|a VTLSSORT00800150015104900900100024506500700077309991